Effects of pupil discretization and Littrow illumination in the simulation of bright-field defect detection.

The simulation of optical defect detection on wafers by microscopy requires several approximations. For the simulation with Fourier modal methods, the number of modes is limited by memory and time consumption. Furthermore, the illumination pupil has to be divided into discrete incidence angles for plane waves. We present a way to save the computation of most of these incidence angles. It works only for certain configurations of grating period and illumination wavelength but is an accurate and robust approximation in these cases. We present sample calculations for one- and two-dimensional periodic structures with defects.

Normal vector method for the RCWA with automated vector field generation.

Early formulations of the RCWA yield, implicated by the erroneous application of factorization rules to discrete Fourier transformations, poor convergence in certain cases. An explanation for this finding and an approach to overcome the problem for crossed gratings was first given by Li [J. Opt. Soc. Am. A 13, 1870 (1996) and 14, 2758 (1997)]. A further improvement was achieved by Schuster et al. [J. Opt. Soc. Am. A 24, 2880 (2007)], using a structure dependent normal vector (NV) field. While it is trivial to create those NV fields for simple geometrical shapes, to our knowledge an appropriate algorithm for arbitrary shapes does not exist, yet. In this work we present such an algorithm.

Normal vector method for convergence improvement using the RCWA for crossed gratings.

The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharam [J. Opt. Soc. Am. A12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems. Those problems are more or less solved for the diffraction from line gratings, but there remain different concurrent proposals about the convergence improvement for crossed gratings. We propose to combine Popov and Nevière's formulation of the differential method [Light Propagation in Periodic Media (Dekker, 2003) and J. Opt. Soc. Am. A18, 2886 (2001)] with the classical RCWA. With a suitable choice of a normal vector field we obtain a better convergence than for the formulations that are known from the literature.

Vectorial thin-element approximation: a semirigorous determination of Kirchhoff's boundary conditions.

A semirigorous model is presented that bridges the gap between classical scalar diffraction theory on the one hand and fully rigorous simulation models on the other. It falls back on the basic ideas of scalar diffraction theory, especially the Kirchhoff approximation. In contrast to classical techniques, however, the boundary values are determined by rigorous methods of the stratified medium theory in the scope of a fully vectorial formulation. By this means the proposed approach takes vertical rigorous coupling effects inside the grating into account while neglecting the lateral ones. We therefore call this method semirigorous and use the name vectorial thin-element approximation. A direct comparison with rigorous coupled-wave analysis as a fully rigorous simulation model allows a detailed discussion of its range of validity and demonstrates a reduction of computation time of the order of 3 magnitudes. In addition, it also reveals deeper insight into the details of the electrodynamics inside diffracting structures. Some examples will demonstrate this benefit.