Advances in Capacitive Micromachined Ultrasonic Transducers.

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

Safety Assessment of Advanced Imaging Sequences I: Measurements.

A method for rapid measurement of intensities (I(spta)), mechanical index (MI), and probe surface temperature for any ultrasound scanning sequence is presented. It uses the scanner's sampling capability to give an accurate measurement of the whole imaging sequence for all emissions to yield the true distributions. The method is several orders of magnitude faster than approaches using an oscilloscope, and it also facilitates validating the emitted pressure field and the scanner's emission sequence software. It has been implemented using the experimental synthetic aperture real-time ultrasound system (SARUS) scanner and the Onda AIMS III intensity measurement system (Onda Corporation, Sunnyvale, CA, USA). Four different sequences have been measured: a fixed focus emission, a duplex sequence containing B-mode and flow emissions, a vector flow sequence with B-mode and flow emissions in 17 directions, and finally a SA duplex flow sequence. A BK8820e (BK Medical, Herlev, Denmark) convex array probe is used for the first three sequences and a BK8670 linear array probe for the SA sequence. The method is shown to give the same intensity values within 0.24% of the AIMS III Soniq 5.0 (Onda Corporation, Sunnyvale, CA, USA) commercial intensity measurement program. The approach can measure and store data for a full imaging sequence in 3.8-8.2 s per spatial position. Based on I(spta), MI, and probe surface temperature, the method gives the ability to determine whether a sequence is within U.S. FDA limits, or alternatively indicate how to scale it to be within limits.

3-D imaging using row-column-addressed arrays with integrated apodization - part i: apodization design and line element beamforming.

This paper investigates the effect of transducerintegrated apodization in row-column-addressed arrays and presents a beamforming approach specific for such arrays. Row-column addressing 2-D arrays greatly reduces the number of active channels needed to acquire a 3-D volume. A disadvantage of row-column-addressed arrays is an apparent ghost effect in the point spread function caused by edge waves. This paper investigates the origin of the edge waves and the effect of introducing an integrated apodization to reduce the ghost echoes. The performance of a λ/2-pitch 5-MHz 128 + 128 row-column-addressed array with different apodizations is simulated. A Hann apodization is shown to decrease imaging performance away from the center axis of the array because of a decrease in main lobe amplitude. Instead, a static roll-off apodization region located at the ends of the line elements is proposed. In simulations, the peak ghost echo intensity of a scatterer at (x,y, z) = (8, 3, 30) mm was decreased by 43 dB by integrating roll-off apodization into the array. The main lobe was unaffected by the apodization. Simulations of a 3-mm-diameter anechoic blood vessel at 30 mm depth showed that applying the transducer-integrated apodization increased the apparent diameter of the vessel from 2.0 mm to 2.4 mm, corresponding to an increase from 67% to 80% of the true vessel diameter. The line element beamforming approach is shown to be essential for achieving correct time-of-flight calculations, and hence avoid geometrical distortions. In Part II of this work, experimental results from a capacitive micromachined ultrasonic transducer with integrated roll-off apodization are given to validate the effect of integrating apodization into the line elements.

3-D imaging using row-column-addressed arrays with integrated apodization- part ii: transducer fabrication and experimental results.

This paper demonstrates the fabrication, characterization, and experimental imaging results of a 62+62 element λ/2-pitch row-column-addressed capacitive micromachined ultrasonic transducer (CMUT) array with integrated apodization. A new fabrication process was used to manufacture a 26.3 mm by 26.3 mm array using five lithography steps. The array includes an integrated apodization, presented in detail in Part I of this paper, which is designed to reduce the amplitude of the ghost echoes that are otherwise prominent for row-column-addressed arrays. Custom front-end electronics were produced with the capability of transmitting and receiving on all elements, and the option of disabling the integrated apodization. The center frequency and -6-dB fractional bandwidth of the array elements were 2.77 ± 0.26 MHz and 102 ± 10%, respectively. The surface transmit pressure at 2.5 MHz was 590 ± 73 kPa, and the sensitivity was 0.299 ± 0.090 V/Pa. The nearest neighbor crosstalk level was -23.9 ± 3.7 dB, while the transmit-to-receive-elements crosstalk level was -40.2 ± 3.5 dB. Imaging of a 0.3-mm-diameter steel wire using synthetic transmit focusing with 62 single-element emissions demonstrated axial and lateral FWHMs of 0.71 mm and 1.79 mm (f-number: 1.4), respectively, compared with simulated axial and lateral FWHMs of 0.69 mm and 1.76 mm. The dominant ghost echo was reduced by 15.8 dB in measurements using the integrated apodization compared with the disabled configuration. The effect was reproduced in simulations, showing a ghost echo reduction of 18.9 dB.

A transverse oscillation approach for estimation of three-dimensional velocity vectors, part II: experimental validation.

The 3-D transverse oscillation method is investigated by estimating 3-D velocities in an experimental flow-rig system. Measurements of the synthesized transverse oscillating fields are presented as well. The method employs a 2-D transducer; decouples the velocity estimation; and estimates the axial, transverse, and elevation velocity components simultaneously. Data are acquired using a research ultrasound scanner. The velocity measurements are conducted with steady flow in sixteen different directions. For a specific flow direction with [α, ß] = [45, 15]°, the mean estimated velocity vector at the center of the vessel is (v(x), v(y), v(z)) = (33.8, 34.5, 15.2) ± (4.6, 5.0, 0.6) cm/s where the expected velocity is (34.2, 34.2, 13.0) cm/s. The velocity magnitude is 50.6 ± 5.2 cm/s with a bias of 0.7 cm/s. The flow angles α and ß are estimated as 45.6 ± 4.9° and 17.6 ± 1.0°. Subsequently, the precision and accuracy are calculated over the entire velocity profiles. On average for all direction, the relative mean bias of the velocity magnitude is -0.08%. For α and ß, the mean bias is -0.2° and -1.5°. The relative standard deviations of the velocity magnitude ranges from 8 to 16%. For the flow angles, the ranges of the mean angular deviations are 5° to 16° and 0.7° and 8°.

Comparison of 3-D synthetic aperture phased-array ultrasound imaging and parallel beamforming.

This paper demonstrates that synthetic aperture imaging (SAI) can be used to achieve real-time 3-D ultrasound phased-array imaging. It investigates whether SAI increases the image quality compared with the parallel beamforming (PB) technique for real-time 3-D imaging. Data are obtained using both simulations and measurements with an ultrasound research scanner and a commercially available 3.5- MHz 1024-element 2-D transducer array. To limit the probe cable thickness, 256 active elements are used in transmit and receive for both techniques. The two imaging techniques were designed for cardiac imaging, which requires sequences designed for imaging down to 15 cm of depth and a frame rate of at least 20 Hz. The imaging quality of the two techniques is investigated through simulations as a function of depth and angle. SAI improved the full-width at half-maximum (FWHM) at low steering angles by 35%, and the 20-dB cystic resolution by up to 62%. The FWHM of the measured line spread function (LSF) at 80 mm depth showed a difference of 20% in favor of SAI. SAI reduced the cyst radius at 60 mm depth by 39% in measurements. SAI improved the contrast-to-noise ratio measured on anechoic cysts embedded in a tissue-mimicking material by 29% at 70 mm depth. The estimated penetration depth on the same tissue-mimicking phantom shows that SAI increased the penetration by 24% compared with PB. Neither SAI nor PB achieved the design goal of 15 cm penetration depth. This is likely due to the limited transducer surface area and a low SNR of the experimental scanner used.

SARUS: A Synthetic Aperture Real-time Ultrasound System.

The Synthetic Aperture Real-time Ultrasound System (SARUS) for acquiring and processing synthetic aperture (SA) data for research purposes is described. The specifications and design of the system are detailed, along with its performance for SA, nonlinear, and 3-D flow estimation imaging. SARUS acquires individual channel data simultaneously for up to 1024 transducer elements for a couple of heart beats, and is capable of transmitting any kind of excitation. The 64 boards in the system house 16 transmit and 16 receive channels each, where sampled channel data can be stored in 2 GB of RAM and processed using five field-programmable gate arrays (FPGAs). The fully parametric focusing unit calculates delays and apodization values in real time in 3-D space and can produce 350 million complex samples per channel per second for full non-recursive synthetic aperture B-mode imaging at roughly 30 high-resolution images/s. Both RF element data and beamformed data can be stored in the system for later storage and processing. The stored data can be transferred in parallel using the system's sixty-four 1-Gbit Ethernet interfaces at a theoretical rate of 3.2 GB/s to a 144-core Linux cluster.