RESUMO
Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 µg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements.
RESUMO
Bioinspired microdevices have made significant strides in various applications including human motion and health detection. However, facile and highly efficient fabrication approach of flexible pressure sensors remains a great challenge. Herein, inspired by the gecko's foot structure, a flexible pressure sensor with microdomes structure is fabricated by tip-assisted on-demand electrohydrodynamic jet (EHD-jet) printing method. Ascribed to the interlocking electrodes with microdome structure, 3D deformation rates are substantially enlarged. When the microdromes structure is under pressure, the resistivity of carbon nanotubes film coated on the surface of microdomes structure will change remarkably. By using the combined effect of assisted tip and ring focusing electrode, the influence and constraints on microstructure fabrication caused by substrate material and morphology are minimized. The desired uniform structures can be adjusted rapidly by changing the printing parameters and liquid properties. High length-height ratio (0.64) of microdomes enhances sensitivity, with minimum detection limit is 2 Pa and response time is 40 ms. Finally, the bionic flexible sensor indicated excellent performance in capable of detecting pressure, sound vibrations and human motion. This work presents a new method for high-efficiency fabrication micro-nano patterns for flexible sensors inspired, which could be used in wearable tech and health monitoring.
RESUMO
The tiny magnetic steel pair (TMSP), composed by two tiny magnetic steel blocks (TMSBs), is critical for some precision instruments. Incorrect matching of TMSP may result in insufficient instrument performance. Herein, the matching method of TMSP based on the Kuhn-Munkres algorithm is proposed. Further, an automatic TMSP matching device is developed. Especially, an ingenious clamp for multiple constraints of TMSB is presented and a visual/magnetism/force hybrid control strategy is realized for the safe and efficient manipulation of TMSBs in a magnetic environment. Moreover, with the TMSBs of a pendulum accelerometer, the matching experiments are conducted to validate the comprehensive performance. The result of the numerical experiment shows that the Kuhn-Munkres algorithm-based method is stable and efficient. The results of measurement and TMSP matching experiments show that the device has good repeatability (<1 mT) and practicability. The proposed matching method has great application prospect in various matching and microassembly of TMSPs.
RESUMO
Piezoelectric transducer wafers are usually used in pairs to adjust the resonant cavity length of the ring laser gyro. In practice, the paired wafers are required to have similar piezoelectric charge coefficient d31. To handle the pairing operation in-batch, an automatic sorting system was developed on the basis of deformation measurement, which adopted a frame of a Cartesian-coordinate robot. The wafers were self-aligned in the vertical direction, and a vacuum holder was used to pick up, transfer, and then place them on thee testing desk one by one. The excitation voltage was loaded on the wafer by a specifically designed electrode, and the resulting micro deformation was measured by dual opposite inductive micrometers using the relative measurement principle. This particular electrode has the function of attitude self-adjustment and vacuum adsorption, which is conducive to loading the voltage reliably and protecting the wafer from undesired damage. Finally, the wafers were transported to different stock bins based on the measuring results. This system is suited to handle a mass of wafers by continuous processing on site for its high reliability and measurement consistency. The measurement accuracy, validated by laser interferometry, was better than 0.5 µm and the repeatability was superior to 0.1 µm.
RESUMO
The machine vision measurement module is indispensable for the Modularized Flexible Precision Assembly Station (MFPAS), which is a fully automatic assembly system being developed at Dalian University of Technology (DUT). MFPAS consists of basic and additional modules, and are expected to be flexible, expandable, and re-configurable to adapt to a variety of parts with a large size range, requiring the machine vision measurement module to be able to achieve accurate measurement of position, as well as orientation of the parts with different size scale. An automatic zooming vision system was set up for evaluation and final integration in MFPAS. Pixel equivalent, principal point and orientation deviation of images were analyzed and experimentally studied using different magnifications of the lens. A new template with circular patterns of different diameters was designed for zoom-lens calibration. The experiments show that the measurement error caused by the variation of the pixel equivalent, principal point and orientation is estimated under 10 µm without online calibration. When high accuracy is required, online calibration can be employed during assembly. The evaluation results of the vision system with or without on-line calibration were given for a better trade-off between accuracy and efficiency during assembly.
RESUMO
In this work, an instrument of drop-on-demand electrohydrodynamic jet (DoD E-Jet) printing device equipped with a current measurement and control system was designed and developed for finely controlling the printing process. The relationships between the current and printing parameters of voltage, frequency, and flow rate were deeply investigated, and the examination data and conclusion were obtained under the condition of the needle size remaining unchanged. Especially, the equation relationship between the flow rate and current was established, which can be used for the modification of the DoD E-Jet printing process. The map describing the stable printing range, droplet size, and current was also recognized, which can help us to select parameters for stable printing. Based on the current measurement and control system and the established relationship, the optimized current and printing parameters were chosen to print uniform graphene microstructures. This instrument provides an effective method for monitoring, adjusting, and controlling the DoD E-Jet printing process and further improving the quality of the printed structures for micro/nanoelectromechanical system (M/NEMS) devices.
RESUMO
Controlled patterning of nanostructures at desired positions is of great importance for high-performance M/NEMS devices. Here, we demonstrate a high-resolution, high-speed and cost-effective fabrication method, named coaxial focused electrohydrodynamic jet printing, to print functional nanostructures. A coaxial needle was designed and developed; a functional ink and high viscosity liquid are applied in the inner and outer needle, respectively. Under optimised conditions, a stable coaxial jet is formed; then, the electrical shearing force and electrical field induce viscous shearing force and internal pressure that are jointly applied on the inner functional ink, focusing the inner jet on the nanoscale. Using this stable coaxial jet with a nano-jet inside it, nanostructures with highly aligned nanowire arrays, nano-freebeams and nano-cantilever beams down to the scale of 40 nm were directly printed. The needle size was 130 µm, and the ratio of the sizes of the needle and the printed structure was as high as 3250/1. This technique realizes the controllable printing of nanoscale structures with the use of a one hundred micrometer-sized needle. The printed PZT nanostructures exhibit pure perovskite structures and distinct piezoelectric responses.
RESUMO
The rail fastening system is an important part of a high-speed railway track. It is always critical to the operational safety and comfort of railway vehicles. Therefore, the condition detection of the rail fastening system, looseness or absence, is an important task in railway maintenance. However, the vision-based method cannot identify the severity of rail fastener looseness. In this paper, the condition of rail fastening system is monitored based on an automatic and remote-sensing measurement system. Meanwhile, wavelet packet analysis is used to analyze the acceleration signals, based on which two damage indices are developed to locate the damage position and evaluate the severity of rail fasteners looseness, respectively. To verify the effectiveness of the proposed method, an experiment is performed on a high-speed railway experimental platform. The experimental results show that the proposed method is effective to assess the condition of the rail fastening system. The monitoring system significantly reduces the inspection time and increases the efficiency of maintenance management.
