RESUMO
Passive high-temperature sensors are a most promising area of use for SAW devices. Langasite (La3Ga5SiO14; LGS) has been identified as promising piezoelectric material to meet high-temperature SAW challenges. Because it is necessary to know the material behavior for an accurate device design, the frequency¿temperature behavior of Rayleigh SAW (R-SAW) and shear-horizontal SAW (SH-SAW) LGS cuts is investigated on delay line and resonator test structures up to 700°C by RF characterization. In the range of the 434-MHz ISM band, the (0°, 22°, 90°) SH-SAW cut shows thermal behavior similar to the (0°, 138.5°, 26.7°) R-SAW cut. Associated with the (0°, 22°, 31°) cut, in which SAWs present mixed types of polarization, the (0°, 22°, 90°) SH-SAW orientation might allow differential measurements on a single substrate. In the temperature range of 400 to 500°C, delay line test devices using the SH-SAW cut show a considerable drop of signal. Theoretical analysis indicates that this newly described behavior might be a result of anisotropy effects in this cut, occurring in case of any slight misorientation of electrode alignment.
