RESUMO
We present an experimental method for direct analysis of guided-mode resonances in photonic crystal slab structures using transmission measurements. By positioning the photonic crystal slab between orthogonally oriented polarization filters light transmission is suppressed except for the guided-mode resonances. Angle resolved transmission measurements with crossed polarizers are performed to obtain the band structure around the Gamma-point. Results are compared to mode simulations. Spatially resolved measurements in a confocal microscope setup are used for homogeneity characterizations. Stitching errors and inhomogeneities in exposure dose down to 1.3% in photonic crystal slabs fabricated by electron beam lithography are observed using this method.
Assuntos
Microscopia Confocal/métodos , Óptica e Fotônica , Cristalização/instrumentação , Elétrons , Desenho de Equipamento , Luz , Microscopia , Nanopartículas , Nanoestruturas/química , Nanotecnologia/métodos , Fótons , Refração OcularRESUMO
A two-dimensional-corrugated-slab-waveguide add/drop filter providing 100% resonant reflection at 1.55 microm wavelength for both TE and TM polarizations with identical FWHM is designed. The fabricated device exhibits a reflectivity spectrum of more than 95% peak reflection for both polarizations at 1.537 microm. The coupling scheme involves the TE0 guided mode only; it is made relatively tolerant by means of a double-sided crossed grating.