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1.
Opt Lett ; 48(23): 6236-6239, 2023 Dec 01.
Artigo em Inglês | MEDLINE | ID: mdl-38039235

RESUMO

Silicon photonic wavefront phase-tilt sensors for wavefront monitoring using surface coupling grating arrays are demonstrated. The first design employs the intrinsic angle dependence of the grating coupling efficiency to determine local wavefront tilt, with a measured sensitivity of 7 dB/°. The second design connects four gratings in an interferometric waveguide circuit to determine incident wavefront phase variation across the sensor area. In this device, one fringe spacing corresponds to 2° wavefront tilt change. These sensor elements sample a wavefront incident on the chip surface without the use of bulk optic elements, fiber arrays, or imaging arrays. Both sensor elements are less than 60 µm across and are potential unit cell sensor elements for large arrays that monitor wavefront shape across an image or pupil plane in adaptive optics systems for free-space optical communications, astronomy, and beam pointing applications.

2.
Opt Lett ; 39(18): 5351-4, 2014 Sep 15.
Artigo em Inglês | MEDLINE | ID: mdl-26466269

RESUMO

We propose a fiber-chip grating coupler that interleaves the standard full and shallow etch trenches in a 220 nm thick silicon layer to provide a directionality upward exceeding 95%. By adjusting the separation between the two sets of trenches, constructive interference is achieved in the upward direction independent of the bottom oxide thickness and without any bottom reflectors, overlays, or customized etch depths. We implement a transverse subwavelength structure in the first two grating periods to minimize back-reflections. The grating coupler has a calculated coupling efficiency of CE~-1.05 dB with a 1 dB bandwidth of 30 nm and minimum feature size of 100 nm, compatible with deep-UV lithography.

3.
Opt Express ; 21(4): 4623-37, 2013 Feb 25.
Artigo em Inglês | MEDLINE | ID: mdl-23481995

RESUMO

A complete photonic wire molecular biosensor microarray chip architecture and supporting instrumentation is described. Chip layouts with 16 and 128 independent sensors have been fabricated and tested, where each sensor can provide an independent molecular binding curve. Each sensor is 50 µm in diameter, and consists of a millimeter long silicon photonic wire waveguide folded into a spiral ring resonator. An array of 128 sensors occupies a 2 × 2 mm2 area on a 6 × 9 mm2 chip. Microfluidic sample delivery channels are fabricated monolithically on the chip. The size and layout of the sensor array is fully compatible with commercial spotting tools designed to independently functionalize fluorescence based biochips. The sensor chips are interrogated using an instrument that delivers sample fluid to the chip and is capable of acquiring up to 128 optical sensor outputs simultaneously and in real time. Coupling light from the sensor chip is accomplished through arrays of sub-wavelength surface grating couplers, and the signals are collected by a fixed two-dimensional detector array. The chip and instrument are designed so that connection of the fluid delivery system and optical alignment are automated, and can be completed in a few seconds with no active user input. This microarray system is used to demonstrate a multiplexed assay for serotyping E. coli bacteria using serospecific polyclonal antibody probe molecules.


Assuntos
Técnicas Biossensoriais/instrumentação , Escherichia coli/isolamento & purificação , Fotometria/instrumentação , Sorotipagem/instrumentação , Análise Serial de Tecidos/instrumentação , Desenho de Equipamento , Análise de Falha de Equipamento
4.
Opt Express ; 20(12): 13470-7, 2012 Jun 04.
Artigo em Inglês | MEDLINE | ID: mdl-22714374

RESUMO

Directional couplers are extensively used devices in integrated optics, but suffer from limited operational wavelength range. Here we use, for the first time, the dispersive properties of sub-wavelength gratings to achieve a fivefold enhancement in the operation bandwidth of a silicon-on-insulator directional coupler. This approach does not compromise the size or the phase response of the device. The sub-wavelength grating based directional coupler we propose covers a 100 nm bandwidth with an imbalance of ≤ 0.6 dB between its outputs, as supported by full 3D FDTD simulations.

5.
Opt Lett ; 36(11): 2110-2, 2011 Jun 01.
Artigo em Inglês | MEDLINE | ID: mdl-21633465

RESUMO

We demonstrate, by experiment and numerical calculations, temperature-independent subwavelength grating waveguides with a periodic composite core composed of alternating regions of silicon and SU-8 polymer. The polymer has a negative thermo-optic (TO) material coefficient that cancels the large positive TO effect of the silicon. Measurements and Bloch mode calculations were carried out over a range of silicon-polymer duty ratios. The lowest measured TO coefficient at a wavelength of 1550 nm is 1.8×10(-6) K(-1); 2 orders of magnitude smaller than a conventional silicon photonic wire waveguide. Calculations predict the possibility of complete cancellation of the silicon waveguide temperature dependence.

6.
Opt Express ; 18(22): 22867-79, 2010 Oct 25.
Artigo em Inglês | MEDLINE | ID: mdl-21164626

RESUMO

A comprehensive investigation of real-time temperature-induced resonance shift cancellation for silicon wire based biosensor arrays is reported for the first time. A reference resonator, protected by either a SU8 or SiO(2) cladding layer, is used to track temperature changes. The temperature dependence of resonators in aqueous solutions, pertinent to biosensing applications, is measured under steady-state conditions and the operating parameters influencing these properties are discussed. Real-time measurements show that the reference resonator resonances reflect the temperature changes without noticeable time delay, enabling effective cancellation of temperature-induced shifts. Binding between complementary IgG protein pairs is monitored over 4 orders of magnitude dynamic range down to a concentration of 20 pM, demonstrating a resolvable mass of 40 attograms. Reactions are measured over time periods as long as 3 hours with high stability, showing a scatter corresponding to a fluid refractive index fluctuation of ± 4 × 10(-6) in the baseline data. Sensor arrays with a SU8 protective cladding are easy to fabricate, while oxide cladding is found to provide superior stability for measurements involving long time scales.


Assuntos
Técnicas Biossensoriais/instrumentação , Técnicas Biossensoriais/métodos , Coloração e Rotulagem , Temperatura , Animais , Eletricidade , Imunoglobulina G/análise , Coelhos , Silício/química , Dióxido de Silício/química , Análise Espectral , Fatores de Tempo
7.
Opt Lett ; 35(19): 3243-5, 2010 Oct 01.
Artigo em Inglês | MEDLINE | ID: mdl-20890347

RESUMO

We demonstrate a fully etched, continuously apodized fiber-to-chip surface grating coupler for the first time (to our knowledge). The device is fabricated in a single-etch step and operates with TM-polarized light, achieving a coupling efficiency of 3.7 dB and a 3 dB bandwidth of 60 nm. A subwavelength microstructure is employed to generate an effective medium engineered to vary the strength of the grating and thereby maximize coupling efficiency, while mitigating backreflections at the same time. Minimum feature size is 100 nm for compatibility with deep-UV 193 nm lithography.

8.
Opt Lett ; 35(16): 2771-3, 2010 Aug 15.
Artigo em Inglês | MEDLINE | ID: mdl-20717452

RESUMO

We report a silicon-on-insulator ring resonator biosensor array with one output port, using wavelength division multiplexing as the addressing scheme. With the use of on-chip referencing for environmental drift cancellation, simultaneous monitoring of multiplexed molecular bindings is demonstrated, with a resolution of 0.3 pg/mm(2) (40 ag of total mass) for protein concentrations over 4 orders of magnitude down to 20 pM. Reactions are measured over time periods as long as 3 h with high stability.


Assuntos
Técnicas Biossensoriais/instrumentação , Silício , Animais , Bovinos , Imunoglobulina G/imunologia , Microtecnologia , Soroalbumina Bovina/análise , Soroalbumina Bovina/imunologia
9.
Opt Lett ; 34(23): 3598-600, 2009 Dec 01.
Artigo em Inglês | MEDLINE | ID: mdl-19953132

RESUMO

We demonstrate a silicon photonic wire waveguide biosensor array chip for the simultaneous monitoring of different molecular binding reactions. The chip is compatible with automated commercial spotting tools and contains a monolithically integrated microfluidic channel for sample delivery. Each array sensor element is a 1.8-mm-long spiral waveguide folded within a 130 microm diameter spot and is incorporated in a balanced Mach-Zehnder interferometer with a near temperature independent response. The sensors are arranged in a 400 microm spacing grid pattern and are addressed through cascaded 1x2 optical power splitters using light from a single input fiber. We demonstrate the real-time monitoring of antibody-antigen reactions using complementary and mismatched immunoglobulin G receptor-analyte pairs and bovine serum albumin. The measured level of detection for each sensor element corresponds to a surface coverage of less than 0.3 pg/mm(2).


Assuntos
Técnicas Biossensoriais/instrumentação , Fótons , Silício , Animais , Técnicas Biossensoriais/métodos , Bovinos , Imunoglobulina G/metabolismo , Análise em Microsséries , Microfluídica , Coelhos , Soroalbumina Bovina/metabolismo , Coloração e Rotulagem , Integração de Sistemas , Fatores de Tempo
10.
Opt Express ; 17(20): 18371-80, 2009 Sep 28.
Artigo em Inglês | MEDLINE | ID: mdl-19907628

RESUMO

We present experimental and theoretical results of label-free molecular sensing using the transverse magnetic mode of a 0.22 mum thick silicon slab waveguide with a surface grating implemented in a guided mode resonance configuration. Due to the strong overlap of the evanescent field of the waveguide mode with a molecular layer attached to the surface, these sensors exhibit high sensitivity, while their fabrication and packaging requirements are modest. Experimentally, we demonstrate a resonance wavelength shift of approximately 1 nm when a monolayer of the protein streptavidin is attached to the surface, in good agreement with calculations based on rigorous coupled wave analysis. In our current optical setup this shift corresponds to an estimated limit of detection of 0.2% of a monolayer of streptavidin.


Assuntos
Técnicas Biossensoriais/instrumentação , Técnicas de Sonda Molecular/instrumentação , Refratometria/instrumentação , Silício/química , Ressonância de Plasmônio de Superfície/instrumentação , Transdutores , Desenho Assistido por Computador , Desenho de Equipamento , Análise de Falha de Equipamento , Luz , Reprodutibilidade dos Testes , Espalhamento de Radiação , Sensibilidade e Especificidade , Silício/efeitos da radiação
11.
Opt Express ; 17(21): 18971-82, 2009 Oct 12.
Artigo em Inglês | MEDLINE | ID: mdl-20372631

RESUMO

A method is developed for extracting the coupling and loss coefficients of ring resonators from the peak widths, depths, and spacings of the resonances of a single resonator. Although the formulas used do not distinguish which coefficient is coupling and which is loss, it is shown how these coefficients can be disentangled based on how they vary with wavelength or device parameters.

12.
Opt Express ; 16(21): 16481-8, 2008 Oct 13.
Artigo em Inglês | MEDLINE | ID: mdl-18852755

RESUMO

We demonstrate by numerical simulations and experiments that highly reflective (HR) facets can be formed on silicon waveguides with high reflectivity diffraction gratings. We use an HR grating with a plane wave reflectivity exceeding 99.99%, as calculated by rigorous coupled wave analysis. Experimentally, we demonstrate the HR effect for silicon-on-insulator waveguide facets patterned lithographically with grating structures. Due to a strong mode size dependence, the maximum facet reflectivity for 1.5 microm thick waveguide is 77%, but finite difference time-domain simulations show that modal reflectivies larger than 90% can be achieved for silicon waveguides with thicknesses of 4 microm or more.


Assuntos
Nanoestruturas/química , Dispositivos Ópticos , Refratometria/instrumentação , Silício/química , Condutividade Elétrica , Desenho de Equipamento , Análise de Falha de Equipamento , Nanoestruturas/ultraestrutura
13.
Opt Express ; 16(19): 15137-48, 2008 Sep 15.
Artigo em Inglês | MEDLINE | ID: mdl-18795053

RESUMO

We demonstrate folded waveguide ring resonators for biomolecular sensing. We show that extending the ring cavity length increases the resonator quality factor, and thereby enhances the sensor resolution and minimum level of detection, while at the same time relaxing the tolerance on the coupling conditions to provide stable and large resonance contrast. The folded spiral path geometry allows a 1.2 mm long ring waveguide to be enclosed in a 150 microm diameter sensor area. The spiral cavity resonator is used to monitor the streptavidin protein binding with a detection limit of approximately 3 pg/mm(2), or a total mass of approximately 5 fg. The real time measurements are used to analyze the kinetics of biotin-streptavidin binding.


Assuntos
Técnicas Biossensoriais/instrumentação , Óptica e Fotônica/instrumentação , Fotometria/instrumentação , Mapeamento de Interação de Proteínas/instrumentação , Proteínas/química , Sítios de Ligação , Miniaturização , Ligação Proteica
14.
Opt Lett ; 33(13): 1479-81, 2008 Jul 01.
Artigo em Inglês | MEDLINE | ID: mdl-18594671

RESUMO

We present theoretical and experimental results on an interference effect caused by boundary reflections on the optical scattering loss in high-index-contrast planar waveguides. Analytical expressions for the polarization-dependent scattering loss are derived using a surface Green's function. For high-index-contrast waveguides of submicrometer dimensions a significant deviation from accepted theory arises, including scattering loss suppression owing to a thin-film interference effect. Our theoretical predictions are confirmed by loss measurements on silicon-on-insulator channel waveguides.

15.
Opt Lett ; 33(6): 596-8, 2008 Mar 15.
Artigo em Inglês | MEDLINE | ID: mdl-18347721

RESUMO

We demonstrate a new silicon photonic wire waveguide evanescent field (PWEF) sensor that exploits the strong evanescent field of the transverse magnetic mode of this high-index-contrast, submicrometer-dimension waveguide. High sensitivity is achieved by using a 2 mm long double-spiral waveguide structure that fits within a compact circular area of 150 microm diameter, facilitating compatibility with commercial spotting apparatus and the fabrication of densely spaced sensor arrays. By incorporating the PWEF sensor element into a balanced waveguide Mach-Zehnder interferometer circuit, a minimum detectable mass of approximately 10 fg of streptavidin protein is demonstrated with near temperature-independent response.


Assuntos
Técnicas Biossensoriais , Óptica e Fotônica , Silício/química , Eletroquímica , Desenho de Equipamento , Interferometria , Teste de Materiais , Fosfatos/química , Fótons , Sensibilidade e Especificidade , Espectrofotometria Infravermelho/métodos , Estreptavidina/química , Propriedades de Superfície , Temperatura , Fatores de Tempo
16.
Opt Lett ; 32(13): 1794-6, 2007 Jul 01.
Artigo em Inglês | MEDLINE | ID: mdl-17603572

RESUMO

We demonstrate the use of subwavelength gratings etched into the facets of silicon-on-insulator ridge waveguides as a means of reducing facet reflectivity by the gradient-index effect. Reflectivities as low as 2.0% and 2.4% for the fundamental TE and TM modes, respectively, are demonstrated experimentally for light of 1.55 microm wavelength, in agreement with both effective medium theory and finite-difference time domain calculations. Simulations show that facet reflectivites can be further reduced to less than 1% by increasing the grating modulation depth.

17.
Opt Express ; 15(5): 2299-306, 2007 Mar 05.
Artigo em Inglês | MEDLINE | ID: mdl-19532464

RESUMO

We demonstrate a 50-channel high-resolution arrayed waveguide grating microspectrometer with a 0.2 nm channel spacing on a silicon-on-insulator (SOI) platform. The chip size is 8 mm x 8 mm. High channel density and spectral resolution are achieved using high aspect ratio 0.6 mum x 1.5 mum waveguide apertures to inject the light into the input combiner and to intercept different spectral channels at the output combiner focal region. The measured crosstalk is <-10 dB, the 3 dB channel bandwidth is 0.15 nm, and the insertion loss is -17 dB near the central wavelength of lambda = 1.545 mum.

18.
Phys Rev Lett ; 93(15): 159601; author reply 159602, 2004 Oct 08.
Artigo em Inglês | MEDLINE | ID: mdl-15524951
19.
Phys Rev Lett ; 90(1): 012501, 2003 Jan 10.
Artigo em Inglês | MEDLINE | ID: mdl-12570603

RESUMO

A new technique, full neutrino momentum reconstruction, is used to set limits on the admixture of heavy neutrinos into the electron neutrino. We measure coincidences between nuclear recoils and positrons from the beta decay of trapped radioactive atoms and deduce the neutrino momentum. A search for peaks in the reconstructed recoil time-of-flight spectrum as a function of positron energy is performed. The admixture upper limits range from 4 x 10(-3) to 2 x 10(-2) and are the best direct limits for neutrinos (as opposed to antineutrinos) for the mass region of 0.7 to 3.5 MeV.

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