The anisotropy in the optical constants of quartz crystals for soft X-rays.

The refractive index of a y-cut SiO2 crystal surface is reconstructed from orientation-dependent soft X-ray reflectometry measurements in the energy range from 45 to 620 eV. Owing to the anisotropy of the crystal structure in the (100) and (001) directions, a significant deviation of the measured reflectance at the Si L 2,3 and O K absorption edges is observed. The anisotropy in the optical constants reconstructed from these data is also confirmed by ab initio Bethe-Salpeter equation calculations for the O K edge. This new experimental data set expands the existing literature data for quartz crystal optical constants significantly, particularly in the near-edge regions.

Refined extreme ultraviolet mask stack model.

A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facilitate accurate simulations of EUV mask performance for high-NA EUV photo-lithography (EUVL) imaging. The model is derived by combined analysis of the measured EUV and x ray reflectivity of an industry-representative mask blank. These two sets of measurements were analyzed using a combined free-form analysis procedure that delivers high-resolution x ray and EUV optical constant depth profiles based on self-adapted sets of sublayers as thin as 0.25 nm providing a more accurate description of the reflectivity than obtained from only EUV reflectivity. "Free-form analysis" means that the shape of the layer interfaces in the model is determined experimentally and is not given a priori by the structure model. To reduce the numerical effort for EUV imaging simulations, a low-resolution model of the multilayer and absorber stack with sublayer thicknesses larger than 2 nm, that fits to only the EUV reflectance, was derived from the high-resolution model. Rigorous high-NA EUVL simulations were done to compare the performance of the new model to our previous work [Proc. SPIE8886, 88860B (2013)PSISDG0277-786X10.1117/12.2030663].

A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence.

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF)-based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular-dependent fluorescence intensities from such periodic 2D and 3D nanoscale structures. The computational scheme is based on the dynamical diffraction theory in many-beam approximation, which allows a semi-analytical solution to the Sherman equation to be derived in a linear-algebraic form. The computational scheme has been used to analyze recently published GIXRF data measured on 2D Si3N4 lamellar gratings, as well as on periodically structured 3D Cr nanopillars. Both the dimensional and structural parameters of these nanostructures have been reconstructed by fitting numerical simulations to the experimental GIXRF data. Obtained results show good agreement with nominal parameters used in the manufacturing of the structures, as well as with reconstructed parameters based on the previously published finite-element-method simulations, in the case of the Si3N4 grating.

Broad-band efficiency calibration of ITER bolometer prototypes using Pt absorbers on SiN membranes.

The energy resolved efficiency of two bolometer detector prototypes for ITER with 4 channels each and absorber thicknesses of 4.5 µm and 12.5 µm, respectively, has been calibrated in a broad spectral range from 1.46 eV up to 25 keV. The calibration in the energy range above 3 eV was performed against previously calibrated silicon photodiodes using monochromatized synchrotron radiation provided by five different beamlines of Physikalische Technische Bundesanstalt at the electron storage rings BESSY II and Metrology Light Source in Berlin. For the measurements in the visible range, a setup was realised using monochromatized halogen lamp radiation and a calibrated laser power meter as reference. The measurements clearly demonstrate that the efficiency of the bolometer prototype detectors in the range from 50 eV up to ≈6 keV is close to unity; at a photon energy of 20 keV the bolometer with the thick absorber detects 80% of the photons, the one with the thin absorber about 50%. This indicates that the detectors will be well capable of measuring the plasma radiation expected from the standard ITER scenario. However, a minimum absorber thickness will be required for the high temperatures in the central plasma. At 11.56 keV, the sharp Pt-L3 absorption edge allowed to cross-check the absorber thickness by fitting the measured efficiency to the theoretically expected absorption of X-rays in a homogeneous Pt-layer. Furthermore, below 50 eV the efficiency first follows the losses due to reflectance expected for Pt, but below 10 eV it is reduced further by a factor of 2 for the thick absorber and a factor of 4 for the thin absorber. Most probably, the different histories in production, storage, and operation led to varying surface conditions and additional loss channels.

An EUV beamsplitter based on conical grazing incidence diffraction.

We present an innovative grating design based on conical diffraction which acts as an almost perfect and low-loss beamsplitter for extreme ultraviolet radiation. The scheme is based on a binary profile operated in grazing incidence along the grating bars under total external reflection. It is shown that periods of a few 10(2) nm may permit an exclusive (±1)(st) order diffraction with efficiencies up to ~ 35% in each of them, whereas higher evanescent orders vanish. In contrast, destructive interference eliminates the 0(th) order. For a sample made of SiO(2) on silicon, measured data and simulated results from rigorous coupled wave analysis procedures are given.

Note: An advanced in situ diagnostic system for characterization of electric propulsion thrusters and ion beam sources.

We present an advanced diagnostic system for in situ characterization of electric propulsion thrusters and ion beam sources. The system uses a high-precision five-axis positioning system with a modular setup and the following diagnostic tools: a telemicroscopy head for optical imaging, a triangular laser head for surface profile scanning, a pyrometer for temperature scanning, a Faraday probe for current density mapping, and an energy-selective mass spectrometer for beam characterization (energy and mass distribution, composition). The capabilities of our diagnostic system are demonstrated with a Hall effect thruster SPT-100D EM1.

Inductive coupled radio frequency plasma bridge neutralizer.

A 13.56 MHz radio frequency plasma bridge neutralizer (rf-PBN) for ion thruster applications as well as ion beam surface processing of insulating materials is presented. The energy for the plasma excitation is inductively coupled into the plasma chamber. Because no components are located inside the plasma, the lifetime of the rf-PBN is expected to be very long. A compact tuning system adapts the input power to the plasma impedance. The electron current may be controlled over a wide range by the rf input power. An electron current of up to 1.6 A has been extracted.

High-accuracy detector calibration in the 3-1500 eV spectral range at the PTB radiometry laboratory.

State-of-the-art detector calibration in the UV/VUV and soft X-ray spectral ranges at the Physikalisch-Technische Bundesanstalt (PTB) is based on the primary detector standard SYRES, a cryogenic electrical substitution radiometer capable of measuring radiant power of a few micro W. At the PTB radiometry laboratory at the synchrotron radiation facility BESSY, two dedicated beamlines are operated, providing monochromatic radiation of high spectral purity, high radiant power and tunable photon energy in the 3-1500 eV range. The spectral responsivity of detectors, e.g. photodiodes, can be measured with a relative uncertainty of about 1% by direct comparison with SYRES, as will be demonstrated for PtSi/Si and GaAsP/Au Schottky and silicon n-on-p photodiodes. The calibration of photon-counting detectors traceable to SYRES can by accomplished by exploiting the unique capability to scale the spectral photon flux over several orders of magnitude by changing the stored electron current. Calibrations of CCDs and photomultipliers are presented as examples.

Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region.

Two Mo/Si multilayer-coated blazed gratings have been fabricated for operation at soft-x-ray wavelengths above the Si L edge, λ ≥ 12.4 nm, at (near) normal incidence. The sawtooth profile of the grating structure was mechanically ruled into a 200-nm Au film that was deposited onto a plane glass substrate. To smooth the rough Au surface and to prevent interdiffusion of the Au film with the upper Mo/Si multilayer, a carbon film was evaporated onto the Au grating surface of one of the gratings before the deposition of the multilayer coating. We matched the multilayer grating, working on blaze in the third diffraction order, in which an absolute diffraction efficiency of 3.4% at a wavelength of 14 nm was measured, whereas only 1.1% was achieved for a similar grating (without a carbon interlayer). These efficiencies are higher than those obtained for other ruled blazed gratings reported in the literature. As a result of the multilayer and grating periodicity, the wavelength of diffraction can be tuned bya rotation of the grating, which is important for application in a soft-x-ray monochromator.