RESUMO
In preceding research endeavors, the frequency characteristics of a ring resonator on surface acoustic waves made of various materials were studied. Investigations encompassed fixation techniques within the housing, the impact of external variables on these components, and the most efficient configuration of the interdigital transducer within the ring resonator to curtail bandwidth. This current study is dedicated to investigating the correlation between sensitivity and the highest measurable acceleration concerning the dimensions of these sensitive elements. Furthermore, it involves assessing the attributes of produced experimental samples to verify the simulation results. The results obtained represent the possibility of creating a micromechanical accelerometer that can be used in the automotive industry as a g-sensor shock, as well as in industries where the numerical value of high overloads is required.
RESUMO
Recently, we proposed a ring-shaped surface acoustic wave (SAW) resonator sensitive element design, as well as analyzed its characteristics and suggested its optimization strategy, with major focus on their temperature stability. Here, we focus on further optimization of the design to narrow the bandwidth and improve signal detection, while taking into account typical technological limitations. Additionally, the purpose of design optimization and modeling is to check the preservation of operability in the case of lithography defects, which is the most common technological error. For that, we suggest structural alteration of the interdigital transducer (IDT) that leads to its partial fragmentation. Using COMSOL Multiphysics computer simulations, we validate several IDT options and show explicitly how it could be optimized by changing its pin geometry. Based on the results of the study, prototyping and printing of ring resonators on a substrate using photolithography will be carried out.
