Spiral-Driven Vertical Conductivity in Nanocrystalline Graphene.

The structure of graphene grown in chemical vapor deposition (CVD) is sensitive to the growth condition, particularly the substrate. The conventional growth of high-quality graphene via the Cu-catalyzed cracking of hydrocarbon species has been extensively studied; however, the direct growth on noncatalytic substrates, for practical applications of graphene such as current Si technologies, remains unexplored. In this study, nanocrystalline graphene (nc-G) spirals are produced on noncatalytic substrates by inductively coupled plasma CVD. The enhanced out-of-plane electrical conductivity is achieved by a spiral-driven continuous current pathway from bottom to top layer. Furthermore, some neighboring nc-G spirals exhibit a homogeneous electrical conductance, which is not common for stacked graphene structure. Klein-edge structure developed at the edge of nc-Gs, which can easily form covalent bonding, is thought to be responsible for the uniform conductance of nc-G aggregates. These results have important implications for practical applications of graphene with vertical conductivity realized through spiral structure.

High-Throughput Growth of Wafer-Scale Monolayer Transition Metal Dichalcogenide via Vertical Ostwald Ripening.

For practical device applications, monolayer transition metal dichalcogenide (TMD) films must meet key industry needs for batch processing, including the high-throughput, large-scale production of high-quality, spatially uniform materials, and reliable integration into devices. Here, high-throughput growth, completed in 12 min, of 6-inch wafer-scale monolayer MoS2 and WS2 is reported, which is directly compatible with scalable batch processing and device integration. Specifically, a pulsed metal-organic chemical vapor deposition process is developed, where periodic interruption of the precursor supply drives vertical Ostwald ripening, which prevents secondary nucleation despite high precursor concentrations. The as-grown TMD films show excellent spatial homogeneity and well-stitched grain boundaries, enabling facile transfer to various target substrates without degradation. Using these films, batch fabrication of high-performance field-effect transistor (FET) arrays in wafer-scale is demonstrated, and the FETs show remarkable uniformity. The high-throughput production and wafer-scale automatable transfer will facilitate the integration of TMDs into Si-complementary metal-oxide-semiconductor platforms.

Two-Dimensional Materials Inserted at the Metal/Semiconductor Interface: Attractive Candidates for Semiconductor Device Contacts.

Metal-semiconductor junctions are indispensable in semiconductor devices, but they have recently become a major limiting factor precluding device performance improvement. Here, we report the modification of a metal/n-type Si Schottky contact barrier by the introduction of two-dimensional (2D) materials of either graphene or hexagonal boron nitride (h-BN) at the interface. We realized the lowest specific contact resistivities (ρc) of 3.30 nΩ cm2 (lightly doped n-type Si, ∼ 1015/cm3) and 1.47 nΩ cm2 (heavily doped n-type Si, ∼ 1021/cm3) via 2D material insertion are approaching the theoretical limit of 1.3 nΩ cm2. We demonstrated the role of the 2D materials at the interface in achieving a low ρc value by the following mechanisms: (a) 2D materials effectively form dipoles at the metal-2D material (M/2D) interface, thereby reducing the metal work function and changing the pinning point, and (b) the fully metalized M/2D system shifts the pinning point toward the Si conduction band, thus decreasing the Schottky barrier. As a result, the fully metalized M/2D system using atomically thin and well-defined 2D materials shows a significantly reduced ρc. The proposed 2D material insertion technique can be used to obtain extremely low contact resistivities in metal/n-type Si systems and will help to achieve major performance improvements in semiconductor technologies.

Fully Stretchable Optoelectronic Sensors Based on Colloidal Quantum Dots for Sensing Photoplethysmographic Signals.

Flexible and stretchable optoelectronic devices can be potentially applied in displays, biosensors, biomedicine, robotics, and energy generation. The use of nanomaterials with superior optical properties such as quantum dots (QDs) is important in the realization of wearable displays and biomedical devices, but specific structural design as well as selection of materials should preferentially accompany this technology to realize stretchable forms of these devices. Here, we report stretchable optoelectronic sensors manufactured using colloidal QDs and integrated with elastomeric substrates, whose optoelectronic properties are stable under various deformations. A graphene electrode is adopted to ensure extreme bendability of the devices. Ultrathin QD light-emitting diodes and QD photodetectors are transfer-printed onto a prestrained elastomeric layout to form wavy configurations with regular patterns. The layout is mechanically stretchable until the structure is converted to a flat configuration. The emissive and active area itself can be stretched or compressed by buckled structures, which are applicable to wearable electronic devices. We demonstrate that these stretchable optoelectronic sensors can be used for continuous monitoring of blood waves via photoplethysmography signal recording. These and related systems create important and unconventional opportunities for stretchable and foldable optoelectronic devices with health-monitoring capability and, thus, meet the demand for wearable and body-integrated electronics.