1.
Anal Bioanal Chem
; 355(7-8): 820-5, 1996 Jul.
Artigo
em Inglês
| MEDLINE
| ID: mdl-15045272
RESUMO
A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The dependence of the signals on gas pressure and net microwave power was investigated.