Three-dimensional chemical-state imaging with reflection-mode soft x-ray absorption spectroscopy.

In this study, a method for reflection-mode soft x-ray absorption spectroscopy was developed to realize three-dimensional chemical-state imaging. Soft x rays from a pinhole were reflected by the sample, and the magnified image was observed with a two-dimensional detector. This technique was applied to a Co film with an Au-island-covered surface to obtain the surface chemical state images with a spatial resolution of several tens of micrometers. Furthermore, the soft x-ray reflection spectra within and outside the Au layer were extracted from the images by changing the photon energy. Distinct differences were observed at the Co absorption edge. By considering anomalous x-ray scattering around the Co L-edges in the simulation, the reflection spectrum near the absorption edge in the nm depth resolution was reproduced. In the region without the Au layer, the results were well reproduced, assuming that 4 nm CoO was formed at the surface. These results demonstrate the feasibility of three-dimensional imaging of the chemical states in multilayer films.

Development of fluorescence-yield wavelength-dispersive x-ray absorption spectroscopy in the soft x-ray region for time-resolved experiments.

A fluorescence-yield wavelength-dispersive x-ray absorption spectroscopy technique in the soft x-ray region, by which the x-ray absorption spectra are recorded without scanning the monochromator, has been developed. The wavelength-dispersed soft x rays, in which the wavelength (photon energy) continuously changes as a function of the position, illuminate the sample, and the emitted fluorescence soft x rays at each position are separately focused by an imaging optics onto each position at a soft x-ray detector. Ni L-edge x-ray absorption spectra for Ni and NiO thin films taken in the wavelength-dispersive mode are shown in order to demonstrate the validity of the technique. The development of the technique paves the way for a real-time observation of time-dependent processes, such as surface chemical reactions, with much higher gas pressure compared to the electron-yield mode, as well as under magnetic and electric fields.