Iterative blind deconvolution method for dwell-time adjustment.

Negative values occur in the calculation results when a fast Fourier transform is used in the algorithm to calculate the dwell time via the dwell-time adjustment algorithm for optical element grinding. In the present study, a processing method for negative values is used in the Fourier iterative Ayers-Dainty (AD) algorithm. The method in which the range of the unit removal shape was adopted in the AD algorithm resulted in a smaller error and enabled the error to be minimized using the quantized dwell-time distribution output.