Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices.

The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices. Often this translates to free-standing, suspended devices and a reusable carrier wafer. This necessitates a sacrificial layer to release the devices from the substrates. Both inorganic (metals and oxides) and organic materials (polymers) have been used as sacrificial materials, but they fall short for fabrication and releasing multilayer SU-8 devices. We propose photoresist AZ 15nXT (MicroChemicals GmbH, Ulm, Germany) to be used as a sacrificial layer. AZ 15nXT is stable during SU-8 processing, making it suitable for fabricating free-standing multilayer devices. We show two methods for cross-linking AZ 15nXT for stable sacrificial layers and three routes for sacrificial release of the multilayer SU-8 devices. We demonstrate the capability of our release processes by fabrication of a three-layer free-standing microfluidic electrospray ionization (ESI) chip and a free-standing multilayer device with electrodes in a microchannel.

A highly sensitive hybrid organic-inorganic sensor for continuous monitoring of hemoglobin.

Microelectronic-based sensors are ideal for real-time continuous monitoring of health states due to their low cost of production, small size, portability, and ease of integration into electronic systems. However, typically semiconductor-based devices cannot be operated in aqueous solutions, especially in solutions with a low pH. However, in this work we overcame this difficulty and demonstrated the feasibility of a hemoglobin sensing array based on hybrid organic GaAs-based devices, which can remain in biological solutions for more than 24h. This was achieved by coating devices with a nanometer-thick polymer protective layer with subsequent adsorption of antibodies on its surface. The device is capable of functioning even in harsh physiological fluids, such as urine and bile juice. The surface modification allows a change in electrical potential, created by the interaction, to be efficiently transferred to the surface of the semiconductor device. By utilizing an array configuration, it is possible to obtain high sensitivity and selectivity.

Patterning gradient properties from sub-micrometers to millimeters by magnetolithography.

A new method is presented for patterning surfaces with gradient properties. The method is based on magnetolithography in which the surface patterning is performed by applying a gradient of a magnetic field on the substrate, using paramagnetic metal masks in the presence of a constant magnetic field. Superparamagnetic nanoparticles (NPs) are deposited on the substrate, and they assemble according to the field and its gradients induced by the mask. Once they pattern the substrate, they protect their sites on the substrate from interacting with any other species. The areas not protected by the NPs can be covered by molecules that chemically bind to the substrate. After these molecules are bound, the NPs are removed, and other molecules may be adsorbed on the newly exposed area. The new technique is based on a parallel process that can be carried out on a full wafer. It provides high resolution, it creates gradient continuously from sub-micrometers to millimeters, and it can be performed on surfaces that are not flat and that are even on the inside of a tube. The gradient that is formed is not limited to a specific property or type of substrate.

Magnetolithographic patterning of inner walls of a tube: a new dimension in microfluidics and sequential microreactors.

By applying magnetolithography it is possible to chemically pattern the inside of tubes. This new capability allows one to perform sequential processes within the tubes. Several enzymatic reactions are demonstrated.