RESUMO
We constructed a double-modulation, reflection-type terahertz (THz) ellipsometer for precise measurement of the thickness of a paint film which is coated on a metal surface and which is not transparent to visible or mid-infrared light. The double-modulation technique enabled us to directly obtain two ellipsometric parameters, Δ(ω) and Ψ(ω), as a function of angular frequency, ω, with a single measurement while reducing flicker noise due to a pump laser. The bias voltage of a photoconductive antenna (PCA) used as a THz pulse emitter was modulated at 100 kHz, and a first lock-in amplifier (LA1) was connected to the output of an electro-optic (EO) signal-sampling unit. In addition, a wire-grid polarizer (WGP) was rotated at 100 Hz to conduct polarization modulation with a frequency of 200 Hz. The output signal from LA1 was fed into a second lock-in amplifier (LA2) that worked in synchronization with the rotating WGP (RWGP). By operating LA2 in a quadrature phase-detection mode, we were able to obtain in-phase and out-of-phase signals simultaneously, from which the two ellipsometric parameters for an isotropic sample could be derived at the same time while cancelling common-mode noise. The lower detection limit of the thickness measurement and the relative standard deviation (RSD) of a black paint film coated on an aluminum substrate were 4.3 µm and 1.4%, respectively. The possibility of determining all elements of the Jones matrix for an anisotropic material is also discussed.
