Unbiased Charged Circular CMUT Microphone: Lumped-Element Modeling and Performance.

An energy-consistent lumped-element equivalent circuit model for charged circular capacitive micromachined ultrasonic transducer (CMUT) cell is derived and presented. It is analytically shown and experimentally verified that a series dc voltage source at the electrical terminals is sufficient to model the charging in CMUT. A model-based method for determining this potential from impedance measurements at low bias voltages is presented. The model is validated experimentally using an airborne CMUT, which resonates at 103 kHz. Impedance measurements, reception measurements at resonance and off-resonance, and the transient response of the CMUT are compared with the model predictions.

Designing transmitting CMUT cells for airborne applications.

We report a new mode of airborne operation for capacitive micromachined ultrasonic transducers (CMUT), in which the plate motion spans the entire gap without collapsing and the transducer is driven by a sinusoidal voltage without a dc bias. We present equivalent-circuit-based design fundamentals for an airborne CMUT cell and verify the design targets using fabricated CMUTs. The performance limits for silicon plates are derived. We experimentally obtain 78.9 dB//20 µPa@1 m source level at 73.7 kHz, with a CMUT cell of radius 2.05 mm driven by 71 V sinusoidal drive voltage at half the frequency. The measured quality factor is 120. We also study and discuss the interaction of the nonlinear transduction force and the nonlinearity of the plate compliance.

An improved lumped element nonlinear circuit model for a circular CMUT cell.

This paper describes a correction and an extension in the previously published large signal equivalent circuit model for a circular capacitive micromachined ultrasonic transducer (CMUT) cell. The force model is rederived so that the energy and power is preserved in the equivalent circuit model. The model is able to predict the entire behavior of CMUT until the membrane touches the substrate. Many intrinsic properties of the CMUT cell, such as the collapse condition, collapse voltage, the voltage-displacement interrelation and the force equilibrium before and after collapse voltage in the presence of external static force, are obtained as a direct consequence of the model. The small signal equivalent circuit for any bias condition is obtained from the large signal model. The model can be implemented in circuit simulation tools and model predictions are in excellent agreement with finite element method simulations.

p-Hertz excitation spectroscopy of an optical antenna, optical transmitter-receiver mechanism.

o-Xylene sensitized biacetyl fluorescence and phosphorescence have been investigated and photosensitized fluorescence and phosphorescence lifetimes of biacetyl in the vapor phase have been determined. Attempts to detect the triplet of biacetyl by its absorption spectrum were unsuccessful, primarily due to, it is believed, the low extinction coefficients of the triplet, and the low triplet concentrations produced by the optical pumping device at room temperature.

High resolution electronic absorption and extinction coefficients of the allyl radical.

Electronic absorption spectra in the 210-250 nm region, were reported for the allyl radical in the vapor phase and subsequent reactions have been investigated by kinetic spectroscopy and gas-liquid chromatography. Extinction coefficients are calculated for the strong absorption bands of the allyl free radical by measured rate constants at room temperature.

High resolution electronic absorption spectra of anisole and phenoxyl radical.

High resolution absorption spectra of anisole and phenoxyl radical has been recorded in the vapor phase at room temperature by flash photolysis technique, and subsequent reactions have been investigated by kinetic spectroscopy. It was possible to follow the kinetics of the radical's decay which occurred predominantly by bimolecular recombination. The concentration of the phenoxyl radical calculated from the concentration of diphenoxyl molecules formed in the reaction cell during the optical pumping. The absolute extinction coefficient of this radical was measured from the absorption band at 291 nm, and found to be 0.95 x 10(+4) mol(-1) 1 cm(-1).