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2.
Appl Opt ; 21(10): 1732-7, 1982 May 15.
Artigo em Inglês | MEDLINE | ID: mdl-20389931

RESUMO

The interferometer and viewing optics that are the main optical components of an automated surface mapping system used to characterize the surface topography and the wall thickness uniformity of opaque and transparent spherical shells are described. To characterize surface finish or wall thickness of spherical shells with an accuracy of 10 nm and a resolution of 1 microm, the differential phase shift between two beams of orthogonal polarizations is measured before and after the probe beam has interacted with the test object.

3.
Rev Sci Instrum ; 49(6): 870, 1978 Jun.
Artigo em Inglês | MEDLINE | ID: mdl-18699214

RESUMO

We describe a simple device for rapidly rotating a small sphere to any orientation for inspection of the surface. The ball is held between two small, flat surfaces and rolls as the surfaces are moved differentially parallel to one another.

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