Elastomeric Polymer Resonant Waveguide Grating based Pressure Sensor.

In this paper, we demonstrate an elastomeric polymer resonant waveguide grating structure to be used as a pressure sensor. The applied pressure is measured by optical resonance spectrum peak shift. The sensitivity - as high as 86.74pm/psi or 12.58pm/kPa - has been experimentally obtained from a fabricated sensor. Potentially, the sensitivity of the demonstrated sensor can be tuned to different pressure ranges by the choices of elastic properties and layer thicknesses of the waveguide and cladding layers. The simulation results agree well with experimental results and indicate that the dominant effect on the sensor is the change of grating period when external pressure is applied. Based on the two-dimensional planar structure, the demonstrated sensor can be used to measure applied surface pressure optically, which has potential applications for optical ultrasound imaging and pressure wave detection/mapping.

An acousto-optic sensor based on resonance grating waveguide structure.

This paper presents an acousto-optic (AO) sensor based on resonance grating waveguide structure. The sensor is fabricated using elastic polymer materials to achieve a good sensitivity to ultrasound pressure waves. Ultrasound pressure waves modify the structural parameters of the sensor and result in the optical resonance shift of the sensor. This converts into a light intensity modulation. A commercial ultrasound transducer at 20 MHz is used to characterize a fabricated sensor and detection sensitivity at different optical source wavelength within a resonance spectrum is investigated. Practical use of the sensor at a fixed optical source wavelength is presented. Ultimately, the geometry of the planar sensor structure is suitable for two-dimensional, optical pressure imaging applications such as pressure wave detection and mapping, and ultrasound imaging.

Polymer waveguide grating sensor integrated with a thin-film photodetector.

This paper presents a planar waveguide grating sensor integrated with a photodetector (PD) for on-chip optical sensing systems which are suitable for diagnostics in the field and in-situ measurements. III-V semiconductor-based thin-film PD is integrated with a polymer based waveguide grating device on a silicon platform. The fabricated optical sensor successfully discriminates optical spectral characteristics of the polymer waveguide grating from the on-chip PD. In addition, its potential use as a refractive index sensor is demonstrated. Based on a planar waveguide structure, the demonstrated sensor chip may incorporate multiple grating waveguide sensing regions with their own optical detection PDs. In addition, the demonstrated processing is based on a post-integration process which is compatible with silicon complementary metal-oxide semiconductor (CMOS) electronics. Potentially, this leads a compact, chip-scale optical sensing system which can monitor multiple physical parameters simultaneously without need for external signal processing.