1.
Opt Express
; 18(6): 5420-5, 2010 Mar 15.
Artigo
em Inglês
| MEDLINE
| ID: mdl-20389558
RESUMO
An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.