Low-temperature grown vertically aligned carbon nanotube array for an optimal infrared bolometer.

Vertically aligned carbon nanotube (VACNT) arrays have been explored as an absorber of thermal-type photodetectors. A long and dense VACNT array absorbs a wide spectral range of incident light with high absorption rate, but has a high thermal mass that results in a low response speed. To achieve a small thermal mass, a shorter and less dense VACNT array is needed. In addition, the high temperature needed to grow the VACNTs is detrimental to the functional sensing materials of the photodetector. The height, density, and growth temperature of VACNTs need to be optimized to achieve a working absorber that has high absorption rate and a high response speed. In this work, a low-temperature plasma enhanced chemical vapor deposition process is used to prepare various VACNT arrays with different heights and densities by controlling the CNT growth parameters. The absorption coefficients of the resulting samples are measured with Fourier transform infrared spectroscopy. An effective medium theory (EMT) is adopted to establish a working model of the VACNTs. Using experimentally extracted CNT density and height as fitting parameters, the EMT model is fitted to obtain theoretical absorption coefficients, which are found to be comparable to the experimentally measured absorption coefficients. Our experimental and theoretical investigations pave the way for future studies to integrate CNTs with infrared photodetectors.

Synthesis and interface characterization of CNTs on graphene.

Carbon nanotubes (CNTs) and graphene are potential candidates for future interconnect materials. CNTs are promising on-chip via interconnect materials due to their readily formed vertical structures, their current-carrying capacity, which is much larger than existing on-chip interconnect materials such as copper and tungsten, and their demonstrated ability to grow in patterned vias with sub-50 nm widths; meanwhile, graphene is suitable for horizontal interconnects. However, they both present the challenge of having high-resistance contacts with other conductors. An all-carbon structure is proposed in this paper, which can be formed using the same chemical vapor deposition method for both CNTs and graphene. Vertically aligned CNTs are grown directly on graphene with an Fe or Ni catalyst. The structural characteristics of the graphene and the grown CNTs are analyzed using Raman spectroscopy and electron microscopy techniques. The CNT-graphene interface is studied in detail using transmission electron microscopic analysis of the CNT-graphene heterostructure, which suggests C-C bonding between the two materials. Electrical measurement results confirm the existence of both a lateral conduction path within graphene and a vertical conduction path in the CNT-graphene heterostructure, giving further support to the C-C bonding at the CNT-graphene interface and resulting in potential applications for all-carbon interconnects.

Effect of improved contact on reliability of sub-60 nm carbon nanotube vias.

Advances in semiconductor technology due to the aggressive downward scaling of on-chip feature sizes have led to rapid rises in the resistivity and current density of interconnect conductors. As a result, current interconnect materials, Cu and W, are subject to performance and reliability constraints approaching or exceeding their physical limits. Therefore, alternative materials are being actively considered as potential replacements to meet such constraints. The carbon nanotube (CNT) is among the leading replacement candidates for on-chip interconnect vias due to its high aspect-ratio nanostructure and superior current-carrying capacity to Cu and W, as well as other potential candidates. Based on the results for 40 nm and 60 nm top-contact metallized CNT vias, we demonstrate that not only are their current-carrying capacities two orders of magnitude higher than their Cu and W counterparts, they are enhanced by reduced via resistance due to contact engineering facilitated by the first reported contact resistance extraction scheme for a 40 nm linewidth.

Electron-beam and ion-beam-induced deposited tungsten contacts for carbon nanofiber interconnects.

Ion-beam-induced deposition (IBID) and electron-beam-induced deposition (EBID) with tungsten (W) are evaluated for engineering electrical contacts with carbon nanofibers (CNFs). While a different tungsten-containing precursor gas is utilized for each technique, the resulting tungsten deposits result in significant contact resistance reduction. The performance of CNF devices with W contacts is examined and conduction across these contacts is analyzed. IBID-W, while yielding lower contact resistance than EBID-W, can be problematic in the presence of on-chip semiconducting devices, whereas EBID-W provides substantial contact resistance reduction that can be further improved by current stressing. Significant differences between IBID-W and EBID-W are observed at the electrode contact interfaces using high-resolution transmission electron microscopy. These differences are consistent with the observed electrical behaviors of their respective test devices.

Carbon nanofiber interconnect RF characteristics improvement with deposited tungsten contacts.

Carbon nanotubes (CNTs) and carbon nanofibers (CNFs) are potential materials for high-performance electronic devices and circuits due to their light weight and excellent electrical properties such as high current capacity and tolerance to electromigration. In addition, at high frequencies, these materials exhibit transport behavior which holds special promise for applications as on-chip interconnects. Contact resistance at CNF-metal interface is a major factor in limiting the electrical performance of CNF interconnects at all frequencies. In this paper, it is demonstrated that the contact resistance can be minimized and the high-frequency characteristics much enhanced by depositing tungsten on CNF-metal electrode contacts.

Modeling of a carbon nanotube ultracapacitor.

The modeling of carbon nanotube ultracapacitor (CNU) performance based on the simulation of electrolyte ion motion between the cathode and the anode is described. Using a molecular dynamics (MD) approach, the equilibrium positions of the electrode charges interacting through the Coulomb potential are determined, which in turn yield the equipotential surface and electric field associated with the capacitor. With an applied ac voltage, the current is computed based on the nanotube and electrolyte particle distribution and interaction, resulting in the frequency-dependent impedance Z(ω). From the current and impedance profiles, the Nyquist and cyclic voltammetry (CV) plots are then extracted. The results of these calculations compare well with existing experimental data. A lumped-element equivalent circuit for the CNU is proposed and the impedance computed from this circuit correlates well with the simulated and measured impedances.

Temperature dependence of carbon nanofiber resistance.

Transport properties under current stress are examined for a carbon nanofiber (CNF) on an insulating substrate between tungsten-deposited gold electrodes. The temperature dependence of CNF resistance is determined based on our previously reported heat transport model. The measured devices exhibit a thermal activation behavior, suggesting transport in a disordered medium. The extracted activation energies fall within the 22-35 meV range.

The effect of catalysts and underlayer metals on the properties of PECVD-grown carbon nanostructures.

The growth behaviors and contact resistances of vertically aligned carbon nanotubes (CNTs) and carbon nanofibers (CNFs) grown on different underlayer metals are investigated. The average diameter, diameter distribution, density, growth rate and contact resistance exhibit strong correlation with the choice of catalyst/underlayer combination. These observations are analyzed in terms of interactions between the catalyst and the underlayer metal. The CNT via test structure has been designed and fabricated to make current-voltage measurements on single CNTs using a nanomanipulator under scanning electron microscopy (SEM) imaging. By analyzing the dependence of measured resistance on CNT diameter, the CNT-metal contact resistance can be extracted. The contact resistances between as-grown CNTs and different underlayer metals are determined. Relationships between contact resistances and various combinations of catalysts and underlayer metals are investigated.

High efficient electrical stimulation of hippocampal slices with vertically aligned carbon nanofiber microbrush array.

Long-term neuroprostheses for functional electrical stimulation must efficiently stimulate tissue without electrolyzing water and raising the extracellular pH to toxic levels. Comparison of the stimulation efficiency of tungsten wire electrodes (W wires), platinum microelectrode arrays (PtMEA), as-grown vertically aligned carbon nanofiber microbrush arrays (VACNF MBAs), and polypyrrole coated (PPy-coated) VACNF MBAs in eliciting field potentials in the hippocampus slice indicates that, at low stimulating voltages that preclude the electrolysis of water, only the PPy-coated VACNF MBA is able to stimulate the CA3 to CA1 pathway. Unlike the W wires, PtMEA, as-grown VACNF MBA, and the PPy-coated VACNF MBA elicit only excitatory postsynaptic potentials (EPSPs). Furthermore, the PPy-coated VACNF MBA evokes somatic action potentials in addition to EPSPs. These results highlight the PPy-coated VACNF's advantages in lower electrode impedance, ability to stimulate tissue through a biocompatible chloride flux, and stable vertical alignment in liquid that enables access to spatially confined regions of neuronal cells.

Growth of carbon nanofibers on nanoscale catalyst strips fabricated with a focused ion beam.

We studied the growth mode of vertically aligned carbon nanofibers (CNFs) on Ni catalyst strips fabricated using a focused ion beam (FIB). We found that the CNF growth on Ni catalysts was strongly affected by the geometry of the microfabricated Ni catalyst strips. Selective growth of vertically aligned CNFs requires ion milling from the outside edge of the sample so that the milled materials are effectively evacuated. The CNF diameter and density on the strip depends on its width. Possible mechanisms to control CNF growth using microfabricated catalysts are analyzed with a liquid model using surface free energies.