RESUMO
A transition edge sensor (TES) microcalorimeter has been developed for use as an energy dispersive X-ray spectrometer. The TES microcalorimeter is a thermal detector that enables one to determine the energy of an incident photon by measuring the resultant increase in temperature. In this work, a Ti/Au TES microcalorimeter was developed to measure LX rays emitted by transuranium elements. The phase transition temperature was set at ~200 mK by using a bilayer structure composed of a 110-nm-thick Au layer and a 40-nm-thick Ti layer. An Au of 5 µm thickness was deposited on the Ti/Au bilayer to achieve an absorption efficiency of 35-80 % for the energy range of LX rays (10-25 keV). The developed TES microcalorimeter was irradiated with LX rays emitted by an (241)Am source at an operating temperature of 140 mK. An energy resolution of ~80 eV (full width at the half maximum) was obtained for L(ß1)X ray of 17.75 keV.
