Multi spectral holographic ellipsometry for a complex 3D nanostructure.

We present an innovative ellipsometry technique called self-interferometric pupil ellipsometry (SIPE), which integrates self-interference and pupil microscopy techniques to provide the high metrology sensitivity required for metrology applications of advanced semiconductor devices. Due to its unique configuration, rich angle-resolved ellipsometric information from a single-shot hologram can be extracted, where the full spectral information corresponding to incident angles from 0° to 70° with azimuthal angles from 0° to 360° is obtained, simultaneously. The performance and capability of the SIPE system were fully validated for various samples including thin-film layers, complicated 3D structures, and on-cell overlay samples on the actual semiconductor wafers. The results show that the proposed SIPE system can achieve metrology sensitivity up to 0.123 nm. In addition, it provides small spot metrology capability by minimizing the illumination spot diameter up to 1 µm, while the typical spot diameter of the industry standard ellipsometry is around 30 µm. As a result of collecting a huge amount of angular spectral data, undesirable multiple parameter correlation can be significantly reduced, making SIPE ideally suited for solving several critical metrology challenges we are currently facing.

Removal of back-reflection noise at ultrathin imaging probes by the single-core illumination and wide-field detection.

Thin waveguides such as graded-index lenses and fiber bundles are often used as imaging probes for high-resolution endomicroscopes. However, strong back-reflection from the end surfaces of the probes makes it difficult for them to resolve weak contrast objects, especially in the reflectance-mode imaging. Here we propose a method to spatially isolate illumination pathways from detection channels, and demonstrate wide-field reflectance imaging free from back-reflection noise. In the image fiber bundle, we send illumination light through individual core fibers and detect signals from target objects through the other fibers. The transmission matrix of the fiber bundle is measured and used to reconstruct a pixelation-free image. We demonstrated that the proposed imaging method improved 3.2 times on the signal to noise ratio produced by the conventional illumination-detection scheme.

Transmission matrix of a scattering medium and its applications in biophotonics.

A conventional lens has well-defined transfer function with which we can form an image of a target object. On the contrary, scattering media such as biological tissues, multimode optical fibers and layers of disordered nanoparticles have highly complex transfer function, which makes them impractical for the general imaging purpose. In recent studies, we presented a method of experimentally recording the transmission matrix of such media, which is a measure of the transfer function. In this review paper, we introduce two major applications of the transmission matrix: enhancing light energy delivery and imaging through scattering media. For the former, we identified the eigenchannels of the transmission matrix with large eigenvalues and then coupled light to those channels in order to enhance light energy delivery through the media. For the latter, we solved matrix inversion problem to reconstruct an object image from the distorted image by the scattering media. We showed the enlargement of the numerical aperture of imaging systems with the use of scattering media and demonstrated endoscopic imaging through a single multimode optical fiber working in both reflectance and fluorescence modes. Our approach will pave the way of using scattering media as unique optical elements for various biophotonics applications.

Exploring anti-reflection modes in disordered media.

Sensing and manipulating targets hidden under scattering media are universal problems that take place in applications ranging from deep-tissue optical imaging to laser surgery. A major issue in these applications is the shallow light penetration caused by multiple scattering that reflects most of incident light. Although advances have been made to eliminate image distortion by a scattering medium, dealing with the light reflection has remained unchallenged. Here we present a method to minimize reflected intensity by finding and coupling light into the anti-reflection modes of a scattering medium. In doing so, we achieved more than a factor of 3 increase in light penetration. Our method of controlling reflected waves makes it readily applicable to in vivo applications in which detector sensors can only be positioned at the same side of illumination and will therefore lay the foundation of advancing the working depth of many existing optical imaging and treatment technologies.

Preferential coupling of an incident wave to reflection eigenchannels of disordered media.

Light waves incident to a highly scattering medium are incapable of penetrating deep into the medium due to the multiple scattering process. This poses a fundamental limitation to optically imaging, sensing, and manipulating targets embedded in opaque scattering layers such as biological tissues. One strategy for mitigating the shallow wave penetration is to exploit eigenchannels with anomalously high transmittance existing in any scattering medium. However, finding such eigenchannels has been a challenging task due to the complexity of disordered media. Moreover, it is even more difficult to identify those eigenchannels from the practically relevant reflection geometry of measurements. In this Letter, we present an iterative wavefront control method that either minimizes or maximizes the total intensity of the reflected waves. We proved that this process led to the preferential coupling of incident wave to either low or high-reflection eigenchannels, and observed either enhanced or reduced wave transmission as a consequence. Since our approach is free from prior characterization measurements such as the recording of transmission matrix, and also able to keep up with sample perturbation, it is readily applicable to in vivo applications. Enhancing light penetration will help improving the working depth of optical sensing and treatment techniques.

Holistic random encoding for imaging through multimode fibers.

The input numerical aperture (NA) of multimode fiber (MMF) can be effectively increased by placing turbid media at the input end of the MMF. This provides the potential for high-resolution imaging through the MMF. While the input NA is increased, the number of propagation modes in the MMF and hence the output NA remains the same. This makes the image reconstruction process underdetermined and may limit the quality of the image reconstruction. In this paper, we aim to improve the signal to noise ratio (SNR) of the image reconstruction in imaging through MMF. We notice that turbid media placed in the input of the MMF transforms the incoming waves into a better format for information transmission and information extraction. We call this transformation as holistic random (HR) encoding of turbid media. By exploiting the HR encoding, we make a considerable improvement on the SNR of the image reconstruction. For efficient utilization of the HR encoding, we employ sparse representation (SR), a relatively new signal reconstruction framework when it is provided with a HR encoded signal. This study shows for the first time to our knowledge the benefit of utilizing the HR encoding of turbid media for recovery in the optically underdetermined systems where the output NA of it is smaller than the input NA for imaging through MMF.

Speckle suppression via sparse representation for wide-field imaging through turbid media.

Speckle suppression is one of the most important tasks in the image transmission through turbid media. Insufficient speckle suppression requires an additional procedure such as temporal ensemble averaging over multiple exposures. In this paper, we consider the image recovery process based on the so-called transmission matrix (TM) of turbid media for the image transmission through the media. We show that the speckle left unremoved in the TM-based image recovery can be suppressed effectively via sparse representation (SR). SR is a relatively new signal reconstruction framework which works well even for ill-conditioned problems. This is the first study to show the benefit of using the SR as compared to the phase conjugation (PC) a de facto standard method to date for TM-based imaging through turbid media including a live cell through tissue slice.

Relation between transmission eigenchannels and single-channel optimizing modes in a disordered medium.

The wave transport through disordered media, although a random process, has some universal physical properties. One of these properties that has been investigated in this report is the relation between transmission eigenchannels and the so-called single-channel optimizing mode, which maximizes the intensity of the transmitted wave at a single specific output channel. Since single-channel optimizing modes have higher transmittance than the uncontrolled waves, it has been predicted before that transmission eigenchannels with higher transmittance preferentially contribute to the single-channel optimizing modes in proportion to the square of eigenvalues. In this Letter, we report the experimental validation of this prediction by measuring cross-correlation between the single-channel optimizing modes and the transmission eigenchannels.

Disorder-mediated enhancement of fiber numerical aperture.

The numerical aperture (NA) of a multimode optical fiber sets the limit of the information transport capacity along the spatial degree of freedom. In this Letter, we report that the application of a highly disordered medium can overcome the capacity limit set by the fiber NA. Specifically, we coated the input surface of a multimode fiber with a disordered medium made of ZnO nanoparticles and transported a wide-field image through the fiber with a spatial resolution beyond the diffraction limit given by the fiber NA. This was made possible because multiple scatterings induced by the disordered medium physically increased the NA of the entire system. Our study will lead to enhancing the spatial resolution of fiber-based endoscopic imaging and also improving the information transport capacity in optical communications.

Scanner-free and wide-field endoscopic imaging by using a single multimode optical fiber.

A single multimode fiber is considered an ideal optical element for endoscopic imaging due to the possibility of direct image transmission via multiple spatial modes. However, the wave distortion induced by the mode dispersion has been a fundamental limitation. In this Letter, we propose a method for eliminating the effect of mode dispersion and therefore realize wide-field endoscopic imaging by using only a single multimode fiber with no scanner attached to the fiber. Our method will potentially revolutionize endoscopy in various fields encompassing medicine and industry.

Experimental measurement of the number of modes for a multimode optical fiber.

For a multimode optical fiber, the number of modes (N(m)) can be calculated by analytic theory when the fiber is straight, twist-free, and strain-free. In practice, however, the fiber is subject to distortions that modify its mode characteristics. In this Letter, we present an experimental method to interrogate the mode properties of a multimode optical fiber. We experimentally measured the transmission matrix of a multimode optical fiber and performed singular value decomposition. We proved, both theoretically and experimentally, that the rank of the transmission matrix is equal to N(m). We expect that the suggested method will contribute to the fields of the biomedical optics and optical communications where optical fiber is widely used.

Synthetic aperture microscopy for high resolution imaging through a turbid medium.

We report on synthetic aperture microscopy through a highly turbid medium. We first recorded a transmission matrix for the turbid medium with an angular basis of 20,000 complex images covering 0.6 NA. This effectively converts the medium into a lens of the same NA. Distorted images of a target object are then taken at 500 different angles of illumination covering 0.6 NA. For each of the distorted images, the original object image is reconstructed from the transmission matrix by the recently developed turbid lens imaging (TLI) technique. All 500 reconstructed images are synthesized to enhance the NA to 1.2 and thereby generate an object image with twice the enhanced spatial resolution of the individual images. Our method of applying aperture synthesis for TLI makes it possible to enhance the resolving power without increasing the number of transmission matrix elements. This relieves the demand for data acquisition and processing that has impeded the practicality of TLI.