1.
ACS Appl Mater Interfaces
; 12(9): 10852-10857, 2020 Mar 04.
Artigo
em Inglês
| MEDLINE
| ID: mdl-32024362
RESUMO
In this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.