RESUMO
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless communication, this research has focused on a high frequency resonator with high quality. However, the resonator based on an inverse piezoelectric effect has met with a bottleneck in high frequency because of the low quality factor. Here, we propose a resonator based on optomechanical interaction (i.e., acoustic-optic coupling). A picosecond laser can excite resonance by radiation pressure. The design idea and the optimization of the resonator are given. Finally, with comprehensive consideration of mechanical losses at room temperature, the resonator can reach a high Q-factor of 1.17 × 104 when operating at 5.69 GHz. This work provides a new concept in the design of NEMS mechanical resonators with a large frequency and high Q-factor.
