Phase retrieval using a modified Shack-Hartmann wavefront sensor with defocus.

This paper proposes a modified Shack-Hartmann wavefront sensor for phase retrieval. The sensor is revamped by placing a detector at a defocused plane before the focal plane of the lenslet array of the Shack-Hartmann sensor. The algorithm for phase retrieval is an optimization with initial Zernike coefficients calculated by the conventional phase reconstruction of the Shack-Hartmann sensor. Numerical simulations show that the proposed sensor permits sensitive, accurate phase retrieval. Furthermore, experiments tested the feasibility of phase retrieval using the proposed sensor. The surface irregularity for a flat mirror was measured by the proposed method and a Veeco interferometer, respectively. The irregularity for the mirror measured by the proposed method is in very good agreement with that measured using the Veeco interferometer.

Three-dimensional particle imaging by wavefront sensing.

We present two methods for three-dimensional particle metrology from a single two-dimensional view. The techniques are based on wavefront sensing where the three-dimensional location of a particle is encoded into a single image plane. The first technique is based on multiplanar imaging, and the second produces three-dimensional location information via anamorphic distortion of the recorded images. Preliminary results show that an uncertainty of 8 microm in depth can be obtained for low-particle density over a thin plane, and an uncertainty of 30 microm for higher particle density over a 10 mm deep volume.

Generalized phase diversity for wave-front sensing.

Phase diversity is a phase-retrieval algorithm that uses a pair of intensity images taken symmetrically about the wave front to be determined. If these images are taken about the system input pupil this is equivalent to a curvature-sensing algorithm. Traditionally a defocus aberration kernel is used to produce the phase-diverse data. We present a generalization of this method to allow the use of other functions as the diversity kernel. We discuss the necessary and sufficient conditions that such a function must satisfy for use in a null wave-front sensor. Computer simulations were used to validate these results.