Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes.

In this work, a capacitive pH sensor consisting of Ta2O5 functional film is designed and fabricated by employing MEMS-based procedures. The Ta2O5 thin film has an amorphous microstructure, and its surface roughness is less than 3.17 nm. A signal processing circuit and a software filtering algorithm are also designed to measure the pH value, thus improving the detection accuracy and anti-interference ability. Good linearity (R2 = 0.99904) and sensitivity (63.12 mV/pH) are recorded for the proposed sensing element in the range of pH 2~12. In addition, the sensor's drift and hysteresis are equal to 5.1 mV and 5.8 mV, respectively. The enhanced sensing performance in combination with the facile miniaturization process, low fabrication cost, and suitability for mass production render the fabricated sensor attractive for applications where pH change measurements in a water environment are required.

Reconfigurable Logic-in-Memory Computing Based on a Polarity-Controllable Two-Dimensional Transistor.

Logic-in-memory architecture holds great promise to meet the high-performance and energy-efficient requirements of data-intensive scenarios. Two-dimensional compacted transistors embedded with logic functions are expected to extend Moore's law toward advanced nodes. Here we demonstrate that a WSe2/h-BN/graphene based middle-floating-gate field-effect transistor can perform under diverse current levels due to the controllable polarity by the control gate, floating gate, and drain voltages. Such electrical tunable characteristics are employed for logic-in-memory architectures and can behave as reconfigurable logic functions of AND/XNOR within a single device. Compared to the conventional devices like floating-gate field-effect transistors, our design can greatly decrease the consumption of transistors. For AND/NAND, it can save 75% transistors by reducing the transistor number from 4 to 1; for XNOR/XOR, it is even up to 87.5% with the number being reduced from 8 to 1.

Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping.

Recently, flexible iontronic pressure sensors (FIPSs) with higher sensitivities and wider sensing ranges than conventional capacitive sensors have been widely investigated. Due to the difficulty of fabricating the nanostructures that are commonly used on electrodes and ionic layers by screen printing techniques, strategies for fabricating such devices using these techniques to drive their mass production have rarely been reported. Herein, for the first time, we employed a 2-dimensional (2D) hexagonal boron nitride (h-BN) as both an additive and an ionic liquid reservoir in an ionic film, making the sensor printable and significantly improving its sensitivity and sensing range through screen printing. The engineered sensor exhibited high sensitivity (Smin> 261.4 kPa-1) and a broad sensing range (0.05-450 kPa), and it was capable of stable operation at a high pressure (400 kPa) for more than 5000 cycles. In addition, the integrated sensor array system allowed accurate monitoring of wrist pressure and showed great potential for health care systems. We believe that using h-BN as an additive in an ionic material for screen-printed FIPS could greatly inspire research on 2D materials for similar systems and other types of sensors. Hexagonal boron nitride (h-BN) was employed for the first time to make iontronic pressure sensor arrays with high sensitivity and a broad sensing range by screen printing.

Chemical Dopant-Free Controlled MoTe2/MoSe2 Heterostructure toward a Self-Driven Photodetector and Complementary Logic Circuits.

Two-dimensional (2D) van der Waals heterostructures based on transition metal dichalcogenides are expected to be unique building blocks for next-generation nanoscale electronics and optoelectronics. The ability to control the properties of 2D heterostructures is the key for practical applications. Here, we report a simple way to fabricate a high-performance self-driven photodetector based on the MoTe2/MoSe2 p-n heterojunction, in which the hole-dominated transport polarity of MoTe2 is easily achieved via a straightforward thermal annealing treatment in air without any chemical dopants or special gases needed. A high photoresponsivity of 0.72 A W-1, an external quantum efficiency up to 41.3%, a detectivity of 7 × 1011 Jones, and a response speed of 120 µs are obtained at zero bias voltage. Additionally, this doping method is also utilized to realize a complementary inverter with a voltage gain of 24. By configuring 2D p-MoTe2 and n-MoSe2 on demand, logic functions of NAND and NOR gates are also accomplished successfully. These results present a significant potential toward future larger-scale heterogeneously integrated 2D electronics and optoelectronics.

Comparison and Verification of Three Algorithms for Accuracy Improvement of Quartz Resonant Pressure Sensors.

Pressure measurement is of great importance due to its wide range of applications in many fields. AT-cut quartz, with its exceptional precision and durability, stands out as an excellent pressure transducer due to its superior accuracy and stable performance over time. However, its intrinsic temperature dependence significantly hinders its potential application in varying temperature environments. Herein, three different learning algorithms (i.e., multivariate polynomial regression, multilayer perceptron networks, and support vector regression) are elaborated in detail and applied to establish the prediction models for compensating the temperature effect of the resonant pressure sensor, respectively. The AC-cut quartz, which is sensitive to temperature variations, is paired with the AT-cut quartz, providing the essential temperature information. The output frequencies derived from the AT-cut and AC-cut quartzes are selected as input data for these learning algorithms. Through experimental validation, all three methods are effective, and a remarkable improvement in accuracy can be achieved. Among the three methods, the MPR model has exceptionally high accuracy in predicting pressure. The calculated residual error over the temperature range of -10-40 °C is less than 0.008% of 40 MPa full scale (FS). An intelligent automatic compensation and real-time processing system for the resonant pressure sensor is developed as well, which may contribute to improving the efficiency in online calibration and large-scale industrialization. This paper paves a promising way for the temperature compensation of resonant pressure sensors.

A Hardware System for Synchronous Processing of Multiple Marine Dynamics MEMS Sensors.

Temperature, depth, conductivity, and turbulence are fundamental parameters of marine dynamics in the field of ocean science. These closely correlated parameters require time-synchronized observations to provide feedback on marine environmental problems, which requires using sensors with synchronized power supply, multi-path data solving, recording, and storage performances. To address this challenge, this work proposes a hardware system capable of synchronously processing temperature, depth, conductivity, and turbulence data on marine dynamics collected by sensors. The proposed system uses constant voltage sources to excite temperature and turbulence sensors, a constant current source to drive a depth sensor, and an alternating current (AC) constant voltage source to drive a conductivity sensor. In addition, the proposed system uses a high-precision analog-digital converter to acquire the direct current (DC) signals from temperature, depth, and turbulence sensors, as well as the AC signals from conductivity sensors. Since the sampling frequency of turbulence sensors is different from that of the other sensors, the proposed system stores the generated data at different storage rates as multiple-files. Further, the proposed hardware system manages these files through a file system (file allocation tab) to reduce the data parsing difficulty. The proposed sensing and hardware logic system is verified and compared with the standard conductivity-temperature-depth measurement system in the National Center of Ocean Standards and Metrology. The results indicate that the proposed system achieved National Verification Level II Standard. In addition, the proposed system has a temperature indication error smaller than 0.02 °C, a conductivity error less than 0.073 mS/cm, and a pressure error lower than 0.8‱ FS. The turbulence sensor shows good response and consistency. Therefore, for observation methods based on a single point, single line, and single profile, it is necessary to study multi-parameter data synchronous acquisition and processing in the time and spatial domains to collect fundamental physical quantities of temperature, salt, depth, and turbulence. The four basic physical parameters collected by the proposed system are beneficial to the in-depth research on physical ocean motion, heat transfer, energy transfer, mass transfer, and heat-energy-mass coupling and can help to realize accurate simulation, inversion, and prediction of ocean phenomena.

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor.

Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To address these issues, this paper proposes a design method for a MEMS piezoresistive pressure sensor, and the fabricated sensor is evaluated in a series of systematic dynamic environmental adaptability tests. After testing, the output sensitivity of the sensor chip was 9.21 mV∙bar-1, while the nonlinearity was 0.069% FSS. The sensor overreacts to rapidly changing pressure environments and can withstand acceleration shocks of up to 20× g. In addition, the sensor is capable of providing normal output over the vibration frequency range of 0-5000 Hz with a temperature coefficient sensitivity of -0.30% FSS °C-1 over the temperature range of 0-80 °C. Our proposed sensor can play a key role in applications with wide pressure ranges, high-frequency vibrations, and high acceleration shocks, as well as guide MEMS-based pressure sensors in high pressure ranges and complex environmental adaptability in their design.

A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration.

This work proposes a design for a direct-reading conductivity sensor with a parallel symmetrical four-electrode structure, which integrates a silicon-based platinum thin-film strip electrode and a serpentine temperature compensation electrode. The optimal structural parameters of the electrode were determined by finite element simulations performed via COMSOL Multiphysics. Next, the designed conductivity sensor chip was fabricated using MEMS technology, and subsequently, the conductivity measurement circuit was designed to test the fabricated sensor's performance. In laboratory tests, the optimal AC excitation frequency was observed to be 1.067 kHz, while the maximum measurement range was 0-107.41 mS/cm and the measurement precision in low concentration range (0-76.422 mS/cm) was ±0.1 mS/cm. Furthermore, the maximum measurement error of the sensor evaluated using the National Center of Ocean Standards and Metrology was ±0.073 mS/cm. The designed sensor possesses the characteristics of high accuracy, high range, and miniaturization, and enables real-time reading of conductivity value and temperature compensation, which is of great significance for the on-site observation of the physical parameters of marine environment.

Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization.

Ultrasound is widely used in industry and the agricultural, biomedical, military, and other fields. As key components in ultrasonic applications, the characteristic parameters of ultrasonic transducers fundamentally determine the performance of ultrasonic systems. High-frequency ultrasonic transducers are small in size and require high precision, which puts forward higher requirements for sensor design, material selection, and processing methods. In this paper, a three-dimensional model of a high-frequency piezoelectric micromachined ultrasonic transducer (PMUT) is established based on the finite element method (FEM). This 3D model consists of a substrate, a silicon device layer, and a molybdenum-aluminum nitride-molybdenum (Mo-AlN-Mo) sandwich piezoelectric layer. The effect of the shape of the transducer's vibrating membrane on the transmission performance was studied. Through a discussion of the parametric scanning of the key dimensions of the diaphragms of the three structures, it was concluded that the fundamental resonance frequency of the hexagonal diaphragm was higher than that of the circle and the square under the same size. Compared with the circular diaphragm, the sensitivity of the square diaphragm increased by 8.5%, and the sensitivity of the hexagonal diaphragm increased by 10.7%. The maximum emission sound-pressure level of the hexagonal diaphragm was 6.6 times higher than that of the circular diaphragm. The finite element results show that the hexagonal diaphragm design has great advantages for improving the transmission performance of the high-frequency PMUT.

Effect of L-Ascorbic Acid Solution Concentration on the Thermoelectric Properties of Silver Selenide Flexible Films Prepared by Vacuum-Assisted Filtration.

Currently, there are several thermoelectric materials, such as Ag2Te, Bi2Te3, and Sb2Te3, that have been investigated for thermoelectric applications. However, the toxicity and rarity of most of these materials make them unsuitable for practical applications. In contrast, silver selenide (Ag2Se) is an abundant and environment-friendly thermoelectric material. This study provides a facile synthetic approach for preparing high-performance, low-cost, and flexible Ag2Se thermoelectric films. Ag2Se nanomaterials were prepared based on the chemical template method, and the reaction solution concentration was varied to systematically investigate the effects of reaction solution concentration on the characterization and thermoelectric properties of Ag2Se nanomaterials. For convenience of testing, the flexible Ag2Se films were prepared on porous nylon membranes using vacuum-assisted filtration. The prepared thermoelectric films were tested using an X-ray diffractometer, scanning electron microscope, Seebeck coefficient tester, and Hall tester. The film prepared from the solution with the lowest concentration (18.0 mM) demonstrated the best thermoelectric performance, with a maximum power factor of 382.18 µW∙m-1∙K-2 at ~400 K. Additionally, a cold-pressing treatment could effectively enhance the electrical conductivity of the film, without damaging the substrate, as the conductivity of the film remained at 90% of the original value after 1500 bending cycles.

Design of a Novel Medical Acoustic Sensor Based on MEMS Bionic Fish Ear Structure.

High-performance medical acoustic sensors are essential in medical equipment and diagnosis. Commercially available medical acoustic sensors are capacitive and piezoelectric types. When they are used to detect heart sound signals, there is attenuation and distortion due to the sound transmission between different media. This paper proposes a new bionic acoustic sensor based on the fish ear structure. Through theoretical analysis and finite element simulation, the optimal parameters of the sensitive structure are determined. The sensor is fabricated using microelectromechanical systems (MEMS) technology, and is encapsulated in castor oil, which has an acoustic impedance close to the human body. An electroacoustic test platform is built to test the performance of the sensor. The results showed that the MEMS bionic sensor operated with a bandwidth of 20-2k Hz. Its linearity and frequency responses were better than the electret microphone. In addition, the sensor was tested for heart sound collection application to verify its effectiveness. The proposed sensor can be effectively used in clinical auscultation and has a high SNR.

Ambipolar 2D Semiconductors and Emerging Device Applications.

With the rise of 2D materials, new physics and new processing techniques have emerged, triggering possibilities for the innovation of electronic and optoelectronic devices. Among them, ambipolar 2D semiconductors are of excellent gate-controlled capability and distinctive physical characteristic that the major charge carriers can be dynamically, reversibly and rapidly tuned between holes and electrons by electrostatic field. Based on such properties, novel devices, like ambipolar field-effect transistors, light-emitting transistors, electrostatic-field-charging PN diodes, are developed and show great advantages in logic and reconfigurable circuits, integrated optoelectronic circuits, and artificial neural network image sensors, enriching the functions of conventional devices and bringing breakthroughs to build new architectures. This review first focuses on the basic knowledge including fundamental principle of ambipolar semiconductors, basic material preparation techniques, and how to obtain the ambipolar behavior through electrical contact engineering. Then, the current ambipolar 2D semiconductors and their preparation approaches and main properties are summarized. Finally, the emerging new device structures are overviewed in detail, along with their novel electronic and optoelectronic applications. It is expected to shed light on the future development of ambipolar 2D semiconductors, exploring more new devices with novel functions and promoting the applications of 2D materials.

Fabrication of Needle-Like Silicon Nanowires by Using a Nanoparticles-Assisted Bosch Process for Both High Hydrophobicity and Anti-Reflection.

In this work, a modified Bosch etching process is developed to create silicon nanowires. Au nanoparticles (NPs) formed by magnetron sputtering film deposition and thermal annealing were employed as the hard mask to achieve controllable density and high aspect ratios. Such silicon nanowire exhibits the excellent anti-reflection ability of a reflectance value of below 2% within a broad light wave range between 220 and 1100 nm. In addition, Au NPs-induced surface plasmons significantly enhance the near-unity anti-reflection characteristics, achieving a reflectance below 3% within the wavelength range of 220 to 2600 nm. Furthermore, the nanowire array exhibits super-hydrophobic behavior with a contact angle over ~165.6° without enforcing any hydrophobic chemical treatment. Such behavior yields in water droplets bouncing off the surface many times. These properties render this silicon nanowire attractive for applications such as photothermal, photocatalysis, supercapacitor, and microfluidics.

High-Performance X-ray Detector Based on Single-Crystal ß-Ga2O3:Mg.

X-ray detection plays an important role in medical imaging, scientific research, and security inspection. Recently, the ß-Ga2O3 single-crystal-based X-ray detector has attracted extensive attention due to its excellent intrinsic properties such as good absorption for X-ray photons, a high breakdown electric field, high stability, and low cost. However, developing a high-performance ß-Ga2O3-based X-ray detector remains a challenge because of the large dark current and the high oxygen vacancy concentration in the crystals. In this paper, we report a high-performance Mg-doped ß-Ga2O3 single-crystal-based X-ray detector with a sandwich structure. The reduced dark current enables the detector to have a high sensitivity of 338.9 µC Gy-1 cm-2 under 50 keV X-ray irradiation with a dose rate of 69.5 µGy/s. The sensitivity is 16-fold higher than that of the commercial amorphous selenium detector. Furthermore, the reduced oxygen vacancy concentration can improve the response speed (<0.2 s) of the detector. The present studies provide a promising method to obtain the high performances for the X-ray detector based on ß-Ga2O3 single crystals.

Recent Progress of Black Silicon: From Fabrications to Applications.

Since black silicon was discovered by coincidence, the special material was explored for many amazing material characteristics in optical, surface topography, and so on. Because of the material property, black silicon is applied in many spheres of a photodetector, photovoltaic cell, photo-electrocatalysis, antibacterial surfaces, and sensors. With the development of fabrication technology, black silicon has expanded in more and more applications and has become a research hotspot. Herein, this review systematically summarizes the fabricating method of black silicon, including nanosecond or femtosecond laser irradiation, metal-assisted chemical etching (MACE), reactive ion etching (RIE), wet chemical etching, electrochemical method, and plasma immersion ion implantation (PIII) methods. In addition, this review focuses on the progress in multiple black silicon applications in the past 10 years. Finally, the prospect of black silicon fabricating and various applications are outlined.

All-Metal-Organic Framework-Derived Battery Materials on Carbon Nanotube Fibers for Wearable Energy-Storage Device.

The ever-increasing demands for portable and wearable electronics continue to drive the development of high-performance fiber-shaped energy-storage devices. Metal-organic frameworks (MOFs) with well-tunable structures and large surface areas hold great potential as precursors and templates to form porous battery materials. However, to date, there are no available reports about fabrication of wearable energy-storage devices on the utilization of all-MOF-derived battery materials directly grown on current collectors. Here, MOF-derived NiZnCoP nanosheet arrays and spindle-like α-Fe2O3 on carbon nanotube fibers are successfully fabricated with impressive electrochemical performance. Furthermore, the resulting all-solid-state fiber-shape aqueous rechargeable batteries take advantage of large specific surface area and abundant reaction sites of well-designed MOF-derived electrode materials to yield a remarkable capacity of 0.092 mAh cm-2 and admirable energy density of 30.61 mWh cm-3, as well as superior mechanical flexibility. Thus, this research may open up exciting opportunities for the development of new-generation wearable aqueous rechargeable batteries.

Facile Synthesis of Na-Doped MnO2 Nanosheets on Carbon Nanotube Fibers for Ultrahigh-Energy-Density All-Solid-State Wearable Asymmetric Supercapacitors.

Flexible fiber-shaped supercapacitors hold promising potential in the area of portable and wearable electronics. Unfortunately, their general application is hindered by the restricted energy densities due to low operating voltage and small specific surface area. Herein, an all-solid-state fiber-shaped asymmetric supercapacitor (FASC) possessing ultrahigh energy density is reported, in which the positive electrode was designed as Na-doped MnO2 nanosheets on carbon nanotube fibers (CNTFs) and the negative electrode as MoS2 nanosheet-coated CNTFs. Owing to the excellent properties of the designed electrodes, our FASCs exhibit a large operating potential window (0-2.2 V), a remarkable specific capacitance (265.4 mF/cm2), as well as an ultrahigh energy density (178.4 µWh/cm2). Moreover, the devices are of outstanding mechanical flexibility.

Floating-gate controlled programmable non-volatile black phosphorus PNP junction memory.

To meet the increasing requirements of minimizing circuits, the development of novel device architectures that use ultra-thin two-dimensional materials is encouraged. Here, we demonstrate a non-volatile black phosphorus (BP) PNP junction in a BP/h-BN/graphene heterostructure in which BP acts as a transport channel layer, hexagonal boron nitride (h-BN) serves as a tunnel barrier layer and graphene is the charge-trapping layer. The device architecture is designed such that only the middle part of the BP is aligned over the graphene flake, enabling the flexible tuning of the charge carriers in the BP over the graphene charge-trapping layer. Thus, the device exhibits the ability to work in two different operating modes (PNP and PP+P). Each operating mode can be retained well and demonstrates non-volatile behavior, and each can be programmed by using the control-gate.

Core-shell coaxially structured triboelectric nanogenerator for energy harvesting and motion sensing.

Converting sustainable human motion energy into electric energy has become an urgent task for the advancement of next-generation wearable and portable electronics. Herein, a core-shell coaxially structured triboelectric nanogenerator (CSTN) was fabricated by inserting an inner hollow circular tube into an outer hollow circular tube, and a gasbag is constructed within the space between the inner and outer tubes. Both Ni-coated polyester conductive textile and the conductive silicone rubber were used as effective electrode materials. The CSTN has excellent properties, including flexibility, light weight, sustainability and biological compatibility due to its unique structural design and materials selection. The CSTN can convert various forms of human motion energy, such as pressing, bending and twisting motion, into electric energy. A high short-circuit current of 11 µA and an open-circuit voltage of 380 V can be obtained from a CSTN with a length of 6 cm, corresponding to a high peak power of 1.638 mW at a load resistance of about 10 MΩ. When six such CSTNs are connected in parallel and placed under shoes, the electric energy output by normal walking can light up 60 LEDs connected serially and power up a competition-timer. The device can also sense different bending angles or twisting angles according to its signal outputs under different deformation angles. This study indicates the promising application prospects of the CSTN for next-generation devices, including self-powered illuminating devices, portable electronics, body motion sensing and health monitoring.

Constructing Ultrahigh-Capacity Zinc-Nickel-Cobalt Oxide@Ni(OH)2 Core-Shell Nanowire Arrays for High-Performance Coaxial Fiber-Shaped Asymmetric Supercapacitors.

Increased efforts have recently been devoted to developing high-energy-density flexible supercapacitors for their practical applications in portable and wearable electronics. Although high operating voltages have been achieved in fiber-shaped asymmetric supercapacitors (FASCs), low specific capacitance still restricts the further enhancement of their energy density. This article specifies a facile and cost-effective method to directly grow three-dimensionally well-aligned zinc-nickel-cobalt oxide (ZNCO)@Ni(OH)2 nanowire arrays (NWAs) on a carbon nanotube fiber (CNTF) with an ultrahigh specific capacitance of 2847.5 F/cm3 (10.678 F/cm2) at a current density of 1 mA/cm2, These levels are approximately five times higher than those of ZNCO NWAs/CNTF electrodes (2.10 F/cm2) and four times higher than Ni(OH)2/CNTF electrodes (2.55 F/cm2). Benefiting from their unique features, we successfully fabricated a prototype coaxial FASC (CFASC) with a maximum operating voltage of 1.6 V, which was assembled by adopting ZNCO@Ni(OH)2 NWAs/CNTF as the core electrode and a thin layer of carbon coated vanadium nitride (VN@C) NWAs on a carbon nanotube strip (CNTS) as the outer electrode with KOH poly(vinyl alcohol) (PVA) as the gel electrolyte. A high specific capacitance of 94.67 F/cm3 (573.75 mF/cm2) and an exceptional energy density of 33.66 mWh/cm3 (204.02 µWh/cm2) were achieved for our CFASC device, which represent the highest levels of fiber-shaped supercapacitors to date. More importantly, the fiber-shaped ZnO-based photodetector is powered by the integrated CFASC, and it demonstrates excellent sensitivity in detecting UV light. Thus, this work paves the way to the construction of ultrahigh-capacity electrode materials for next-generation wearable energy-storage devices.