Design and Optimization of MEMS Resonant Pressure Sensors with Wide Range and High Sensitivity Based on BP and NSGA-II.

With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new sensor structure. By arranging the resonant beam and the sensitive diaphragm vertically in space, the new structure improves the rigidity of the diaphragm without changing the thickness of the diaphragm and achieves the purpose of increasing the range without affecting the sensitivity. To find the optimal structural parameters for the sensor sensitivity and range, and to prevent the effects of modal disturbances, we propose a multi-objective optimization design scheme based on the BP and NSGA-II algorithms. The optimization of the structure parameters not only improved the sensitivity but also increased the interference frequency to solve the issue of mode interference. The optimized structure achieves a sensitivity and range of 4.23 Hz/kPa and 1-10 MPa, respectively. Its linear influence factor is 38.07, significantly higher than that of most resonant pressure sensors. The structural and algorithmic optimizations proposed in this paper provide a new method for designing resonant pressure sensors compatible with a wide range and high sensitivity.

A novel fault diagnosis method for second-order bandpass filter circuit based on TQWT-CNN.

To accurately locate faulty components in analog circuits, an analog circuit fault diagnosis method based on Tunable Q-factor Wavelet Transform(TQWT) and Convolutional Neural Network (CNN) is proposed in this paper. Firstly, the Grey Wolf algorithm (GWO) is used to improve the TQWT. The improved TQWT can adaptively determine the parameters Q-factor and decomposition level. Secondly, The signal is decomposed, and single-branch reconstruction is conducted with TQWT to facilitate adequate feature extraction. Thirdly, to capture the time-frequency features in the signal, a CNN-LSTM network is built by combining CNN and LSTM for feature extraction. Finally, CNN, which introduces Fully Convolutional Network (FCN) layers and a Batch Normalization layer, is used to fault diagnosis. The method was comprehensively evaluated with a second-order bandpass filter circuit. The experimental results illustrate that the proposed fault diagnosis method can achieve excellent fault diagnosis accuracy, and the average accuracy is 98.96%.

Adaptive Dynamic Analysis of MEMS Gyroscope Random Noise Based on PID-DAVAR.

As a MEMS gyroscope is susceptible to environmental interference, its performance is degraded due to random noise. Accurate and rapid analysis of random noise of MEMS gyroscope is of great significance to improve the gyroscope's performance. A PID-DAVAR adaptive algorithm is designed by combining the PID principle with DAVAR. It can adaptively adjust the length of the truncation window according to the dynamic characteristics of the gyroscope's output signal. When the output signal fluctuates drastically, the length of the truncation window becomes smaller, and the mutation characteristics of the intercepted signal are analyzed detailed and thoroughly. When the output signal fluctuates steadily, the length of the truncation window becomes larger, and the intercepted signals are analyzed swiftly and roughly. The variable length of the truncation window ensures the confidence of the variance and shortens the data processing time without losing the signal characteristics. Experimental and simulation results show that the PID-DAVAR adaptive algorithm can shorten the data processing time by 50%. The tracking error of the noise coefficients of angular random walk, bias instability, and rate random walk is about 10% on average, and the minimum error is about 4%. It can accurately and promptly present the dynamic characteristics of the MEMS gyroscope's random noise. The PID-DAVAR adaptive algorithm not only satisfies the requirement of variance confidence but also has a good signal-tracking ability.

Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation.

As an effective capacitance signal produced by a micro-hemisphere gyro is usually below the pF level, and the capacitance reading process is susceptible to parasitic capacitance and environmental noise, it is highly difficult to acquire an effective capacitance signal. Reducing and suppressing noise in the gyro capacitance detection circuit is a key means to improve the performance of detecting the weak capacitance generated by MEMS gyros. In this paper, we propose a novel capacitance detection circuit, where three different means are utilized to achieve noise reduction. Firstly, the input common-mode feedback is applied to the circuit to solve the input common-mode voltage drift caused by both parasitic capacitance and gain capacitance. Secondly, a low-noise, high-gain amplifier is used to reduce the equivalent input noise. Thirdly, the modulator-demodulator and filter are introduced to the proposed circuit to effectively mitigate the side effects of noise; thus, the accuracy of capacitance detection can be further improved. The experimental results show that with the input voltage of 6 V, the newly designed circuit produces an output dynamic range of 102 dB and the output voltage noise of 5.69 nV/√Hz, achieving a sensitivity of 12.53 V/pF.

Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II.

Although one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a resonator with the best structure. How to obtain the best resonator under specific technical and process limits is a significant topic for us. In this paper, the optimization of a MEMS polysilicon hemispherical resonator, designed by patterns based on PSO-BP and NSGA-II, was introduced. Firstly, the geometric parameters that significantly contribute to the performance of the resonator were determined via a thermoelastic model and process characteristics. Variety regulation between its performance parameters and geometric characteristics was discovered preliminarily using finite element simulation under a specified range. Then, the mapping between performance parameters and structure parameters was determined and stored in the BP neural network, which was optimized via PSO. Finally, the structure parameters in a specific numerical range corresponding to the best performance were obtained via the selection, heredity, and variation of NSGAII. Additionally, it was demonstrated using commercial finite element soft analysis that the output of the NSGAII, which corresponded to the Q factor of 42,454 and frequency difference of 8539, was a better structure for the resonator (generated by polysilicon under this process within a selected range) than the original. Instead of experimental processing, this study provides an effective and economical alternative for the design and optimization of high-performance HRGs under specific technical and process limits.

Experimental Investigation on the Surface Formation Mechanism of NdFeB during Diamond Wire Sawing.

Diamond wire sawing is widely used in processing NdFeB rare earth permanent magnets. However, it induces periodic saw marks and fracture chipping pits, which severely affect the flatness and surface quality of the products. In this study, the lateral motion of the diamond wire was monitored to determine the surface formation mechanism. Then, a white light interferometer and an SEM were used to observe the sawed surface profile. Finally, the surface quality was quantitatively studied by identifying the area rate of fracture chipping pits with an image recognition MATLAB script. According to the observation results, the calculation formula of PV which is related to the process parameters was deduced. Additionally, by combining the fracture rate and wire vibration, a novel method was proposed to investigate the optimal process parameters. It can be found that the surface quality sawed at P = 0.21 MPa, vf = 0.2 mm/min, and vs = 1.8 m/s remains better than when sawed at P = 0.15 MPa, vf = 0.1 mm/min, and vs = 1.8 m/s, which means the sawing efficiency can be doubled under such circumstances, i.e., when the surface quality remains the same.

Dispersion and Polishing Mechanism of a Novel CeO2-LaOF-Based Chemical Mechanical Polishing Slurry for Quartz Glass.

Quartz glass shows superior physicochemical properties and is used in modern high technology. Due to its hard and brittle characteristics, traditional polishing slurry mostly uses strong acid, strong alkali, and potent corrosive additives, which cause environmental pollution. Furthermore, the degree of damage reduces service performance of the parts due to the excessive corrosion. Therefore, a novel quartz glass green and efficient non-damaging chemical mechanical polishing slurry was developed, consisting of cerium oxide (CeO2), Lanthanum oxyfluoride (LaOF), potassium pyrophosphate (K4P2O7), sodium N-lauroyl sarcosinate (SNLS), and sodium polyacrylate (PAAS). Among them, LaOF abrasive showed hexahedral morphology, which increased the cutting sites and uniformed the load. The polishing slurry was maintained by two anionic dispersants, namely SNLS and PAAS, to maintain the suspension stability of the slurry, which makes the abrasive in the slurry have a more uniform particle size and a smoother sample surface after polishing. After the orthogonal test, a surface roughness (Sa) of 0.23 nm was obtained in the range of 50 × 50 µm2, which was lower than the current industry rating of 0.9 nm, and obtained a material removal rate (MRR) of 530.52 nm/min.

Microstructure and Mechanical Properties of Nanoparticulate Y2O3 Modified AlSi10Mg Alloys Manufactured by Selective Laser Melting.

AlSi10Mg has a good forming ability and has been widely accepted as an optimal material for selective laser melting (SLM). However, the strength and elongation of unmodified AlSi10Mg are insufficient, which limits its application in the space industry. In this paper, yttrium oxide (Y2O3) nanoparticles modified AlSi10Mg composites that were manufactured using SLM. The effects of Y2O3 nanoparticles (0~2 wt.% addition) on the microstructure and mechanical properties of AlSi10Mg alloys were investigated. An ultimate tensile strength of 500.3 MPa, a yield strength of 322.3 MPa, an elongation of 9.7%, a good friction coefficient of 0.43, and a wear rate of (3.40 ± 0.09) ×10-4 mm3·N-1·m-1 were obtained with the addition of 0.5 wt.% Y2O3 nanoparticles, and all these parameters were higher than those of the SLMed AlSi10Mg alloy. The microhardness of the composite with 1.0 wt.% Y2O3 reached 145.6 HV0.1, which is an increase of approximately 22% compared to the unreinforced AlSi10Mg. The improvement of tensile properties can mainly be attributed to Orowan strengthening, fine grain strengthening, and load-bearing strengthening. The results show that adding an appropriate amount of Y2O3 nanoparticles can significantly improve the properties of the SLMed AlSi10Mg alloy.

Enhanced Photo-Fenton Activity of SnO2/α-Fe2O3 Composites Prepared by a Two-Step Solvothermal Method.

The x-SnO2/α-Fe2O3 (x = 0.04, 0.07, and 0.1) heterogeneous composites were successfully prepared via a two-step solvothermal method. These composites were systematically characterized by the X-ray diffraction technique, field emission scanning electron microscopy, an energy dispersive spectrometer, X-ray photoelectron spectroscopy and a UV-visible spectrometer. It was found that SnO2 nanoparticles were uniformly decorated on the surface of α-Fe2O3 particles in these heterogeneous composites. A comparative study of methylene blue (MB) photodegradation by α-Fe2O3 and x-SnO2/α-Fe2O3 composites was carried out. All x-SnO2/α-Fe2O3 composites showed higher MB photodegradation efficiency than α-Fe2O3. When x = 0.07, the MB photodegradation efficiency can reach 97% in 60 min. Meanwhile, the first-order kinetic studies demonstrated that the optimal rate constant of 0.07-SnO2/α-Fe2O3 composite was 0.0537 min-1, while that of pure α-Fe2O3 was only 0.0191 min-1. The catalytic mechanism of MB photodegradation by SnO2/α-Fe2O3 was examined. The SnO2 can act as a sink and help the effective transfer of photo-generated electrons for decomposing hydrogen peroxide (H2O2) into active radicals. This work can provide a new insight into the catalytic mechanism of the photo-Fenton process.

Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning.

Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed.

Enhancement of the Conductivity and Uniformity of Silver Nanowire Flexible Transparent Conductive Films by Femtosecond Laser-Induced Nanowelding.

In order to improve the performance of silver nanowire (AgNW) flexible transparent conductive films (FTCFs), including the conductivity, uniformity, and reliability, the welding of high repetition rate femtosecond (fs) laser is applied in this work. Fs laser irradiation can produce local enhancement of electric field, which induce melting at the gap of the AgNWs and enhance electrical conductivity of nanowire networks. The overall resistivity of the laser-welded AgNW FTCFs reduced significantly and the transparency changed slightly. Meanwhile, PET substrates were not damaged during the laser welding procedure in particular parameters. The AgNW FTCFs can achieve a nonuniformity factor of the sheet resistance as 4.6% at an average sheet resistance of 16.1 Ω/sq and transmittance of 91%. The laser-welded AgNW FTCFs also exhibited excellent reliability against mechanical bending over 10,000 cycles. The welding process may open up a new approach for improvement of FTCFs photoelectric property and can be applied in the fabrication of silver nanostructures for flexible optoelectronic and integration of functional devices.

A silver nanoparticle-modified evanescent field optical fiber sensor for methylene blue detection.

A silver nanoparticle-modified evanescent field optical fiber sensor based on a MEMS microchannel chip has been successfully fabricated. Experimental results show that the sensor response decreases linearly with increasing concentration of analyte. Over a range of methylene blue concentrations from 0 to 0.4 µmol/mL, the sensor response is linear (R = 0.9496). A concentration variation of 0.1 µmol/mL can cause an absorbance change of 0.402 dB. Moreover, the optical responses of the same sensing fiber without decoration and modified with silver nanoparticles have also been compared. It can be observed that the output intensity of the Ag nanoparticle-modified sensor is enhanced and the sensitivity is higher. Meanwhile, the absorbance spectra are found to be more sensitive to concentration changes compared to the spectra of the peak wavelength.

Formation and Stimuli-Directed Migration of D. discoideum Slugs in Microchips.

This paper presents a microfluidic device that geometrically constrains the development of individual Dictyostelium discoideum cells into multicellular organisms (slugs). A microchip for the stimuli-directed migration of slugs is also presented. To demonstrate the formation of slugs in a predetermined shape, a microchip is designed to confine the slugs in the vertical direction. In the microchip, sufficient oxygen is supplied to the cells via a membrane, allowing the formation and adaptation of slugs to the shape of the channel. In addition, the manipulation of slug migration direction in a microchip via external stimuli, such as light and temperature gradients, that induce phototaxis and thermotaxis of slugs, respectively, is demonstrated. To direct slug migration with external stimuli, an optical fiber is used for phototaxis and an electrical wire heater is used for thermotaxis. Experimental results show slug formation in a predefined geometry in the microchip, suggesting that this chip is potentially useful for understanding the relationship between the shape and function of cells or tissue. The controlled migration of slugs demonstrated in the microchips can potentially be employed in biologically based microactuators or microrobots.

Light-Directed Migration of D. discoideum Slugs in Microfabricated Confinements.

This paper investigates the light-driven migration of the multi-cellular microorganism Dictyostelium discoideum as a potential bio-actuation mechanism in microsystems. As a platform for slug migration we use microscale confinements, which consist of intersecting microchannels fabricated from solidified agar-water solution. The agar surface provides necessary moisture to the slugs during the experiment while remaining sufficiently stiff to allow effective slug migration. The movements of the slugs in the microchannels are driven and guided by phototaxis via controlling light transmitted through optical fibers. The microchannels impose geometrical confinements on the migrating slugs, improving the spatial precision of the migration. We demonstrate that slugs that form in a microchamber can be driven to migrate through the microchannels, as well as steered to a particular direction at microchannel intersections. Our experimental results indicate that slug movements can be more effectively controlled in microchannels, and potentially useful for bio-actuation applications.