Your browser doesn't support javascript.
loading
Mostrar: 20 | 50 | 100
Resultados 1 - 20 de 65
Filtrar
Mais filtros










Intervalo de ano de publicação
1.
Sci Rep ; 14(1): 10559, 2024 May 08.
Artigo em Inglês | MEDLINE | ID: mdl-38719923

RESUMO

Hotspots are high-intensity electromagnetic zones that form, for example, at the interstitials of plasmonic nanoaggregates, resulting in a considerable rise in the enhancement factor. However, it is inevitable to achieve specific nanometric geometry as well as a suitable technique to capture the details of hotspots. We report near-field surface-enhanced Raman scattering (SERS) spectroscopy of a well-defined gold nanoaggregate of a few nanoparticles adsorbed with a small number of target analytes. A spectrally and spatially resolved SERS measurement setup using an aperture near-field scanning optical microscope (a-NSOM) facilitated the direct observation of localized electromagnetic (EM) fields at the interstitials through SERS. Correlated optical image and corresponding nanometric geometry were captured through the home-built a-NSOM setup. Near-field SERS spectra were recorded at different sites of interest. It was evident that the interstitial positioned at the center of the tetramer provided the most intense Raman scattering, implying the possibility of a SERS-active hotspot therein. SERS bands of the spectrum of the Raman-active dye Rhodamine 6G recorded at the same hotspot coincided well with those reported so far. It was noteworthy that most of the SERS bands in such scenery got enhanced. Such direct observation with high spatial resolution is indispensable to understanding the origin of localized EM fields at "hotspots" and the EM enhancement factor in the SERS process. A finite-difference time-domain (FDTD) analysis was carried out to validate the results.

2.
ACS Appl Mater Interfaces ; 16(15): 19453-19462, 2024 Apr 17.
Artigo em Inglês | MEDLINE | ID: mdl-38576414

RESUMO

Inkjet printing of liquid crystal (LC) microlens arrays is particularly appealing for the development of switchable 2D/3D organic light-emitting diode (OLED) displays, as the printing process ensures that the lenses can be deposited directly and on-demand onto the pixelated OLED layer without the need for additional steps, thus simplifying fabrication complexity. Even if different fabrication technologies have been employed and good results in LC direct printing have already been achieved, all the systems used require costly equipment and heated nozzles to reduce the LC solution's viscosity. Here, we present the direct printing of a nematic LC (NLC) lens by a Drop-on-Demand (DoD) inkjet printing by a pyro-electrohydrodynamic effect for the first time. The method works at ambient temperature and avoids dispensing nozzles, thus offering a noncontact manipulation approach of liquid with high resolution and good repeatability on different kinds of substrates. NLC microlenses are printed on different substrates and fully characterized. Polarization properties are evaluated for various samples, i.e., NLC lenses on unaligned and indium-tin oxide (ITO) aligned. Moreover, an in-depth characterization of the NLC lenses is reported by polarized optical microscopy and by analyzing the birefringence in digital holographic microscopy.

3.
ACS Nano ; 18(19): 12333-12340, 2024 May 14.
Artigo em Inglês | MEDLINE | ID: mdl-38688009

RESUMO

In this study, we investigated the optical properties of a transition metal dichalcogenide (TMD) substrate via Mie-scattering-induced surface analysis (MISA). Employing near-field optical microscopy and finite-difference time-domain (FDTD) simulations, we systemically prove and directly visualize the Mie scattering of superspherical gold nanoparticles (s-AuNPs) at the nanoscale. Molybdenum disulfide substrates exhibited optical isotropy, while rhenium disulfide (ReS2) substrates showed anisotropic behavior attributed to the interaction with incident light's electric field. Our study revealed substantial anisotropic trends in Mie scattering, particularly in the near-infrared energy range, with ReS2 exhibiting more pronounced spectral and angular responses in satellite peaks. Our results emphasize the application of Mie scattering, exploring the optical properties of substrates and contributing to a deeper understanding of nanoscale light-matter interactions.

4.
Sci Rep ; 14(1): 5291, 2024 03 04.
Artigo em Inglês | MEDLINE | ID: mdl-38438467

RESUMO

This study aimed to measure marginal and internal fit using images captured with both an optical microscope and a smartphone camera, comparing the fit measurement performance of these devices and analyzing their correlation. Working casts (with 10 posterior and 10 anterior teeth) created to fabricate fixed dental prostheses were used. These working casts were scanned using a desktop scanner (E1) to design an interim crown, and the designed interim crown was fabricated using a three-dimensional (3D) printer. Utilizing the silicone replica technique, the fabricated interim crown replicated the fit, which was then captured using both an optical microscope and a smartphone camera. The captured images were used to measure the marginal and internal fit according to the imaging device. Intraclass correlation coefficients (ICC) were used for reliability analysis according to the imaging device. Furthermore, the Wilcoxon signed-rank test was adopted for the comparative evaluation of the marginal and internal fit between the imaging devices (α = 0.05). The measurement results of the marginal and internal fit according to the optical microscope and smartphone camera did exhibit a significant difference (P < 0.05). The ICC between the two devices showed an "excellent" agreement of over 0.9 at all measurement points (P < 0.001). A smartphone camera could be used to obtain images for evaluating the marginal and internal fit.


Assuntos
Prótese Dentária , Smartphone , Correlação de Dados , Estudos de Viabilidade , Reprodutibilidade dos Testes
5.
Front Microbiol ; 15: 1328923, 2024.
Artigo em Inglês | MEDLINE | ID: mdl-38516011

RESUMO

We present a novel optical nanomotion-based rapid antibiotic and antifungal susceptibility test. The technique consisted of studying the effects of antibiotics or antifungals on the nanometric scale displacements of bacteria or yeasts to assess their sensitivity or resistance to drugs. The technique relies on a traditional optical microscope, a video camera, and custom-made image analysis software. It provides reliable results in a time frame of 2-4 h and can be applied to motile, non-motile, fast, and slowly growing microorganisms. Due to its extreme simplicity and low cost, the technique can be easily implemented in laboratories and medical centers in developing countries.

6.
Artif Intell Med ; 149: 102773, 2024 Mar.
Artigo em Inglês | MEDLINE | ID: mdl-38462274

RESUMO

The selection of embryos is a key for the success of in vitro fertilization (IVF). However, automatic quality assessment on human IVF embryos with optical microscope images is still challenging. In this study, we developed a clinical consensus-compliant deep learning approach, named Esava (Embryo Segmentation and Viability Assessment), to quantitatively evaluate the development of IVF embryos using optical microscope images. In total 551 optical microscope images of human IVF embryos of day-2 to day-3 were collected, preprocessed, and annotated. Using the Faster R-CNN model as baseline, our Esava model was constructed, refined, trained, and validated for precise and robust blastomere detection. A novel algorithm Crowd-NMS was proposed and employed in Esava to enhance the object detection and to precisely quantify the embryonic cells and their size uniformity. Additionally, an innovative GrabCut-based unsupervised module was integrated for the segmentation of blastomeres and embryos. Independently tested on 94 embryo images for blastomere detection, Esava obtained the high rates of 0.9940, 0.9121, and 0.9531 for precision, recall, and mAP respectively, and gained significant advances compared with previous computational methods. Intraclass correlation coefficients indicated the consistency between Esava and three experienced embryologists. Another test on 51 extra images demonstrated that Esava surpassed other tools significantly, achieving the highest average precision 0.9025. Moreover, it also accurately identified the borders of blastomeres with mIoU over 0.88 on the independent testing dataset. Esava is compliant with the Istanbul clinical consensus and compatible to senior embryologists. Taken together, Esava improves the accuracy and efficiency of embryonic development assessment with optical microscope images.


Assuntos
Aprendizado Profundo , Gravidez , Feminino , Humanos , Consenso , Fertilização in vitro/métodos , Desenvolvimento Embrionário , Blastômeros
7.
Microscopy (Oxf) ; 2024 Feb 22.
Artigo em Inglês | MEDLINE | ID: mdl-38421047

RESUMO

We developed a simple coordinate transformation method for quickly locating features of interest (FOIs) of samples in transmission electron microscope (TEM). The method is well suited for conducting sample searches in aberration-corrected scanning/transmission electron microscopes (S/TEM), where the survey can be very time-consuming because of the limited field of view imposed by the highly excited objective lens after fine-tuning the aberration correctors. For implementation, a digital image of the sample and the TEM holder was captured using a simple stereo-optical microscope. Naturally presented geometric patterns on the holder were referenced to construct a projective transformation between the electron and optical coordinate systems. The test results demonstrated that the method was accurate and required no electron microscope or specimen holder modifications. Additionally, it eliminated the need to mount the sample onto specific patterned TEM grids or deposit markers, resulting in universal applications for most TEM samples, holders and electron microscopes for fast FOI identification. Furthermore, we implemented the method into a Gatan script for graphical-user-interface-based step-by-step instructions. Through online communication, the script enabled real-time navigation and tracking of the motion of samples in TEM on enlarged optical images with a panoramic view.

8.
Mikrochim Acta ; 191(1): 55, 2023 12 28.
Artigo em Inglês | MEDLINE | ID: mdl-38153588

RESUMO

Tumor necrosis factor-alpha (TNF-α) is a cytokine secreted by the macrophages and Th1 cells of the immune system in response to inflammation. Given its significance as a biomarker with elevated levels in physiological fluids in various conditions, there is an increasing demand for a simple and accurate TNF-α detection strategy. In this article, we present a liquid crystal (LC)-based biosensor developed for sensitive TNF-α detection. The biosensor operates as follows: TNF-α and detection antibodies (DAbs) form complexes during preincubation. These complexes then bind with the surface-immobilized capture antibodies (CAbs), facilitating the antigen-antibody reaction between the CAbs and the TNF-α/DAb complexes. This target recognition interaction alters the surface topography, disrupting the vertical orientation of LCs produced by dimethyloctadecyl[3-(trimethoxysilyl)-propyl]ammonium chloride. The orientational change in the LCs can be easily visualized with a polarized optical microscope, resulting in brighter images as TNF-α levels rise. Our results demonstrated a linear range of 5.00-500 pg/mL, with a limit of detection and limit of quantification being 1.08 and 3.56 pg/mL, respectively. Recovery experiments on diluted saliva samples produced reasonable results, with TNF-α recoveries ranging from 97.1% ± 2.58% to 107% ± 5.95%.


Assuntos
Técnicas Biossensoriais , Fator de Necrose Tumoral alfa , Anticorpos , Anticorpos Imobilizados , Citocinas , Cristais Líquidos , Fator de Necrose Tumoral alfa/análise , Humanos
9.
Nano Lett ; 23(21): 9900-9906, 2023 Nov 08.
Artigo em Inglês | MEDLINE | ID: mdl-37862605

RESUMO

Scanning near-field optical microscope (SNOM) with nanoscale spatial resolution has been a powerful tool in studying the plasmonic properties of nano materials/structures. However, the quantification of the SNOM measurement remains a major challenge in the field due to the lack of reliable methodologies. We employed the point-dipole model to describe the tip-surface interaction upon laser illumination and theoretically derived the quantitative relationship between the measured results and the actual near-field electric field strength. Thus, we can experimentally reconstruct the near-field electric field through this theoretically calculated relationship. We also developed an experimental technique together with FEM simulation to get the above relationship experimentally and reconstruct the near-field electric field from the measurement by SNOM.

10.
Heliyon ; 9(7): e17869, 2023 Jul.
Artigo em Inglês | MEDLINE | ID: mdl-37539154

RESUMO

Intensity diffusion caused by optical diffraction limits the imaging resolution of conventional optical microscopes, therefore modelling and measuring the intensity transmission and distribution property of the light sources is a significant research topic in system development and pattern recognition. However, the complicated wave propagation process in optical imaging makes it difficult to provide a direct, analytical and simple mathematical model to measure the relationship between the blur degree and various camera parameters. In this study, an improved intensity transmission and distribution calculation method for conventional optical microscopes was proposed; furthermore, a simple mathematical relation between the blur degree and camera parameters was achieved based on the proposed method. First, the light intensity distribution and propagation characteristics of a conventional optical microscope were modeled based on the property of the Fresnel circular hole diffraction combined with the practical optical parameters. Second, by analyzing the property of intensity distribution and blurring imaging, a quantitative simplified mathematical relationship between the blur degree and camera parameters in optical microscope imaging was obtained, and the three-dimensional (3D) blur property in the optical imaging process was analyzed under different conditions. Third, the connection between diffractive optics and geometric optics was obtained by summarizing and generalizing the 3D blur property curve of each monochromatic light source. Finally, the proposed method was verified through a series of simulations and experiments.

11.
J Biophotonics ; 16(11): e202300190, 2023 11.
Artigo em Inglês | MEDLINE | ID: mdl-37545092

RESUMO

The dichroic mirror (DM) is a key component in microscope. We found a ghost in the reflection channel of a dual-channel fluorescence microscope and studied the relationship between the ghost and the incidence angle θ into the DM. The DM emission surface reflection generated ghost if the θ is not 45 ° . We analyzed the distance and intensity relationship between the ghost and the primary image, which is θ -dependent and was demonstrated by imaging live cells and a stage micrometer. The ghost can be eliminated by placing the DM between objective and tube lens, but not between tube lens and detector, ensuring that the incident light into the DM is approximately parallel. Furthermore, the transmitted light of the DM is shifted towards a longer wavelength with increasing θ . Collectively, microscopists must carefully optimize the θ when designing a microscope to avoid the ghost.


Assuntos
Microscopia de Fluorescência , Microscopia de Fluorescência/métodos
12.
J Med Signals Sens ; 13(2): 160-164, 2023.
Artigo em Inglês | MEDLINE | ID: mdl-37448549

RESUMO

Automating the camera Lucida method which is a standard way for focusing microscopic images is a very challenging study for many scientists. Hence, actually combining hardware and software to automate microscopic imaging systems is one of the most important issues in the field of medicine as well. This idea reduces scanning time and increases the accuracy of user's results in this field. Closed-loop control system has been designed and implemented in the hardware part to move the stage in predefined limits of 15°. This system produces 50 consecutive images from parasites at the mentioned spatial distances in two directions of the z-axis. Then, by introducing our proposed relational software with combining images, a high-contrast image can be presented. This colored image is focused on many subparts of the sample even with different ruggedness. After implementing the closed-loop controller, stages movement was repeated eight times with an average step displacement of 20 µm which were measured in two directions of the z-axis by a digital micrometer. On average, the movement's error was 1 µm. In software, the edge intensity energy index has been calculated for image quality evaluation. The standard camera Lucida method has been simulated with acceptable results based on experts' opinions and also mean squared error parameters. Mechanical movement in stage has an accuracy of about 95% which will meet the expectations of laboratory user. Although output-focused colored images from our combining software can be replaced by the traditional fully accepted Camera Lucida method.

13.
Biotechnol Appl Biochem ; 70(6): 1972-1982, 2023 Dec.
Artigo em Inglês | MEDLINE | ID: mdl-37479671

RESUMO

We report here a liquid crystal (LC)-based sensor for detecting serotonin (5-HT); the proposed sensor uses target-specific aptamer recognition at a cationic surfactant decorated-aqueous/LC interface. Our detection strategy focuses on the orientational transition of LCs upon biological interactions at the interface. In this sensing system, the cationic surfactant hexadecyltrimethylammonium bromide (CTAB) forms a self-assembled monolayer at the aqueous/LC interface and triggers the homeotropic orientation of LCs. After introducing the 5-HT specific aptamer, an electrostatic attraction occurs between the cationic CTAB and anionic aptamer. This interaction destructs the surfactant monolayer at the interface, inducing reorganization of LC alignment from homeotropic to tilted conditions. In the increasing 5-HT levels, specific binding between 5-HT and the aptamer diminishes the interaction between the aptamer and CTAB, thereby maintaining the homeotropic alignment of LCs. The orientational transition of the LCs was observed under a polarized optical microscope. The developed biosensor has a linear detection range from 1 to 1000 nM and a detection limit of 1.68 nM. Moreover, the sensor was applied to a human urine sample and a detection limit of 2.25 nM was obtained. Overall, the designed LC-based sensor is a sensitive, simple, cost effective, and selective platform for detecting 5-HT in aqueous solutions.


Assuntos
Técnicas Biossensoriais , Cristais Líquidos , Humanos , Serotonina , Cristais Líquidos/química , Cetrimônio , Tensoativos/química , Oligonucleotídeos , Água/química
14.
Polymers (Basel) ; 15(8)2023 Apr 20.
Artigo em Inglês | MEDLINE | ID: mdl-37112099

RESUMO

The effect of fusion temperature and duration on the nonisothermal crystallization kinetics of polyamide 6 (PA6) was investigated using differential scanning calorimetry (DSC) and a polarized optical microscope (OM). The rapid cooling method involved heating the polymer above its melting point, holding it at this temperature to ensure complete melting, and then rapidly cooling it to the crystallization temperature. By monitoring the heat flow during cooling, the crystallization kinetics of PA6 were characterized, including the degree of crystallinity, crystallization temperature, and crystallization rate. The study found that changing the fusion temperature and duration significantly impacted the crystallization kinetics of PA6. Increasing the fusion temperature decreased the degree of crystallinity, with smaller nucleation centers requiring a higher degree of supercooling for crystallization. The crystallization temperature shifted towards lower temperatures, and the crystallization kinetics slowed down. The study also found that lengthening the fusion time raised the relative crystallinity, but any further increase did not result in a significant change. The study showed that an increase in fusion temperature led to a longer time needed to reach a given level of crystallinity, reducing the crystallization rate. This can be explained by the thermodynamics of the crystallization process, where higher temperatures promote molecular mobility and crystal growth. Moreover, the study revealed that decreasing a polymer's fusion temperature can lead to a greater degree of nucleation and faster growth of the crystalline phase, which can significantly impact the values of the Avrami parameters used to characterize the crystallization kinetics.

15.
Bio Protoc ; 13(4): e4611, 2023 Feb 20.
Artigo em Inglês | MEDLINE | ID: mdl-36845530

RESUMO

Chloroplast movement has been observed and analyzed since the 19th century. Subsequently, the phenomenon is widely observed in various plant species such as fern, moss, Marchantia polymorpha, and Arabidopsis. However, chloroplast movement in rice is less investigated, presumably due to the thick wax layer on its leaf surface, which reduces light sensitivity to the point that it was previously believed that there was no light-induced movement in rice. In this study, we present a convenient protocol suitable for observing chloroplast movement in rice only by optical microscopy without using special equipment. It will allow researchers to explore other signaling components involved in chloroplast movement in rice.

16.
Methods Mol Biol ; 2646: 327-336, 2023.
Artigo em Inglês | MEDLINE | ID: mdl-36842127

RESUMO

Mycoplasma mobile is one of the fastest gliding bacteria, gliding with a speed of 4.5 µm s-1. This gliding motility is driven by a concerted movement of 450 supramolecular motor units composed of three proteins, Gli123, Gli349, and Gli521, in the gliding motility machinery. With general experimental setups, it is difficult to obtain the information on how each motor unit works. This chapter describes strategies to decrease the number of active motor units to extract stepwise cell movements driven by a minimum number of motor units. We also describe an unforeseen motility mode in which the leg motions convert the gliding motion into rotary motion, which enables us to characterize the motor torque and energy-conversion efficiency by adding some more assumptions.


Assuntos
Proteínas de Bactérias , Mycoplasma , Proteínas de Bactérias/metabolismo , Rotação , Mycoplasma/metabolismo , Movimento
17.
Ind Health ; 61(2): 134-139, 2023 Apr 01.
Artigo em Inglês | MEDLINE | ID: mdl-35545556

RESUMO

The amount of asbestos body (AB) in the human lungs is used as an index to assess asbestos lung cancer (ALC). This study reports a new method to observe the same AB previously observed by analytical transmission electron microscope (ATEM) by phase contrast microscope (PCM) or the contrary order. Four kinds of specimens were prepared from the lung tissue of an asbestos related worker: ordinary PCM specimen (A); PCM specimen (B) of which the cover glass was stripped off and ashed at a low temperature; transmission electron microscope (TEM) specimen (C); and PCM specimen (D) covered a TEM specimen (C) with immersion liquid and cover glass. These specimens were all observed by PCM, and the specimen (C) by analytical TEM (ATEM). The results showed that the TEM specimen (C) is transparent in visible light and we can also see the particles by PCM. The image by PCM of the TEM specimen (C) showed very similar features to that of PCM specimens (A) and (B). Accordingly, we could observe various same particles by both ATEM and PCM. In conclusion, the method observing the same AB by both PCM and ATEM will contribute to standardize the recognition of AB for PCM analysts.


Assuntos
Amianto , Exposição Ocupacional , Humanos , Exposição Ocupacional/efeitos adversos , Microscopia de Contraste de Fase , Pulmão , Microscopia Eletrônica de Transmissão
18.
World Neurosurg ; 170: 133-137, 2023 Feb.
Artigo em Inglês | MEDLINE | ID: mdl-36400360

RESUMO

BACKGROUND: The exoscope has been proposed as a valid tool in 5-aminolevulinic acid-guided resection of high-grade gliomas. However, it is not clear if, beyond ergonomics, the exoscope provides a real benefit over the optical microscope (OM). The aim of this study was to compare the exoscope with the OM in terms of surgical visualization and workflow in 5-aminolevulinic acid-guided brain surgery. METHODS: Surgical videos of patients diagnosed with histopathologically confirmed, Shinoda stage I, high-grade gliomas who underwent surgery in from January to April 2022 were studied. Visualization under a 5-aminolevulinic acid blue filter for vessels, parenchyma, surgical instruments, and fluorescence was categorized for both superficial and deep fields. The following data were also recorded: median number of switches between white light and blue filter, average duration per switch, and amount of work under blue filter. RESULTS: There were 5 surgeries performed under OM guidance and 5 performed under exoscope guidance. Under a blue filter, the exoscope was significantly better than the OM in visualizing vessels, parenchyma, and surgical instruments for both superficial and deep surgical fields. The median number of switches between blue and white light was lower compared with the OM. Both median switch duration and percentage of work under the blue filter were superior when using the exoscope. CONCLUSIONS: Within the limitations of a preliminary analysis, use of the exoscope in fluorescence-guided surgery for high-grade gliomas provided significant advantages in terms of visualization of the surgical field under a blue filter and linearity of surgical flow.


Assuntos
Neoplasias Encefálicas , Glioma , Humanos , Ácido Aminolevulínico , Neoplasias Encefálicas/diagnóstico por imagem , Neoplasias Encefálicas/cirurgia , Fluxo de Trabalho , Glioma/diagnóstico por imagem , Glioma/cirurgia
19.
Artigo em Chinês | WPRIM (Pacífico Ocidental) | ID: wpr-964448

RESUMO

Objective@#To investigate the application value of 3D microscope in vascular anastomosis in oral and maxillofacial surgery, to provide a reference for clinicians. @*Methods @#Eighty-seven cases of free flap reconstruction in oral and maxillofacial surgery were retrospectively included, including 30 cases in the 3D microscope group and 57 cases in the optical microscope group. The differences in intraoperative vascular anastomosis time, postoperative flap survival rate and doctor evaluation scores between the 3D microscope group and the optical microscope group were compared and statistically analyzed, and the feasibility of using three-dimensional microscope in surgery was evaluated. @*Results @#The arterial anastomosis time was (26.53±3.83) min/root in the 3D microscope group and (24.88 ± 2.97) min/root in the optical microscope group, and the difference was statistically significant (P<0.05). The venous anastomosis time was (30.68 ± 3.51) min/root in the three-dimensional microscope group and (28.70 ± 2.91) min/root in the optical microscope group, and the difference was statistically significant (P<0.05). There was no significant difference in the survival rate of flaps between the 3D microscope group (n = 28, 93.33%) and the optical microscope group (n = 53, 92.98%) (P>0.05). The doctor's evaluation scores of visual fatigue, training and learning, operative difficulty index, image sharing in the three-dimensional microscope group were higher than those in the optical microscope group, and the differences were statistically significant (P<0.05). @* Conclusion @# 3D microscope has good reliability and safety in surgery, a strong sense of three-dimensionality, and the convenience of teaching and training. It can be well applied to vascular anastomosis in oral and maxillofacial surgery.

20.
Nano Converg ; 9(1): 53, 2022 Dec 02.
Artigo em Inglês | MEDLINE | ID: mdl-36459274

RESUMO

This article presents a technique of scattering-type scanning near-field optical microscopy (s-SNOM) based on scanning probe microscopy as a nanoscale-resolution chemical visualization technique of the structural changes in photoresist thin films. Chemical investigations were conducted in the nanometer regime by highly concentrated near-field infrared on the sharp apex of the metal-coated atomic force microscopy (AFM) tip. When s-SNOM was applied along with Fourier transform infrared spectroscopy to characterize the extreme UV- and electron-beam (e-beam)-exposed hydrogen silsesquioxane films, line and space patterns of half-pitch 100, 200, 300, and 500 nm could be successfully visualized prior to pattern development in the chemical solutions. The linewidth and line edge roughness values of the exposed domains obtained by s-SNOM were comparable to those extracted from the AFM and scanning electron microscopy images after development. The chemical analysis capabilities provided by s-SNOM provide new analytical opportunities that are not possible with traditional e-beam-based photoresist measurement, thus allowing information to be obtained without interference from non-photoreaction processes such as wet development.

SELEÇÃO DE REFERÊNCIAS
DETALHE DA PESQUISA
...