Characterization of a-SiC(x):H thin films as an encapsulation material for integrated silicon based neural interface devices.
Thin Solid Films
; 516(1): 34-41, 2007 Nov 01.
Article
in En
| MEDLINE
| ID: mdl-18437249
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Thin Solid Films
Year:
2007
Document type:
Article
Affiliation country:
United States
Country of publication:
Netherlands