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Phonon response in the infrared region to thickness of oxide films formed by atomic layer deposition.
Scarel, Giovanna; Na, Jeong-Seok; Gong, Bo; Parsons, Gregory N.
Affiliation
  • Scarel G; North Carolina State University, Department of Chemical and Biomolecular Engineering, 911 Partners Way, Centennial Campus, Raleigh, North Carolina 27695, USA. scarelgx@jmu
Appl Spectrosc ; 64(1): 120-6, 2010 Jan.
Article in En | MEDLINE | ID: mdl-20132607
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Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Spectrosc Year: 2010 Document type: Article Affiliation country: United States Country of publication: United States
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Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Spectrosc Year: 2010 Document type: Article Affiliation country: United States Country of publication: United States