Integral equation analysis and optimization of 2D layered nanolithography masks by complex images Green's function technique in TM polarization. | J Opt Soc Am A Opt Image Sci Vis;29(5): 748-56, 2012 May 01. | MEDLINE

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Integral equation analysis and optimization of 2D layered nanolithography masks by complex images Green's function technique in TM polarization.

Haghtalab, Mohammad; Faraji-Dana, Reza.

Affiliation

Haghtalab M; Center of Excellence on Applied Electromagnetics Systems, School of Electrical and Computer Engineering, University of Tehran, P.O. Box 14395-515, Tehran, Iran.

J Opt Soc Am A Opt Image Sci Vis ; 29(5): 748-56, 2012 May 01.

Article in En | MEDLINE | ID: mdl-22561933

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: J Opt Soc Am A Opt Image Sci Vis Journal subject: OFTALMOLOGIA Year: 2012 Document type: Article Affiliation country: Iran Country of publication: United States

Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: J Opt Soc Am A Opt Image Sci Vis Journal subject: OFTALMOLOGIA Year: 2012 Document type: Article Affiliation country: Iran Country of publication: United States