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Integration of nanoimprint lithography with block copolymer directed self-assembly for fabrication of a sub-20 nm template for bit-patterned media.
Yang, XiaoMin; Xiao, Shuaigang; Hu, Wei; Hwu, Justin; van de Veerdonk, René; Wago, Koichi; Lee, Kim; Kuo, David.
Affiliation
  • Yang X; Media Research Center, Seagate Technology, 47010 Kato Road, Fremont, California 94538, USA.
Nanotechnology ; 25(39): 395301, 2014 Oct 03.
Article in En | MEDLINE | ID: mdl-25189432

Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Clinical_trials Language: En Journal: Nanotechnology Year: 2014 Document type: Article Affiliation country: United States Country of publication: United kingdom

Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Clinical_trials Language: En Journal: Nanotechnology Year: 2014 Document type: Article Affiliation country: United States Country of publication: United kingdom