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Novel chemical route for atomic layer deposition of MoS2 thin film on SiO2/Si substrate.
Jin, Zhenyu; Shin, Seokhee; Kwon, Do Hyun; Han, Seung-Joo; Min, Yo-Sep.
Affiliation
  • Jin Z; Department of Chemical Engineering, Konkuk University, 120 Neungdong-Ro, Gwangjin-Gu, Seoul 143-701, Korea. ysmin@konkuk.ac.kr.
Nanoscale ; 6(23): 14453-8, 2014 Nov 06.
Article in En | MEDLINE | ID: mdl-25340905
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanoscale Year: 2014 Document type: Article Country of publication: United kingdom
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanoscale Year: 2014 Document type: Article Country of publication: United kingdom