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Electrochemical nanoimprinting of silicon.
Sharstniou, Aliaksandr; Niauzorau, Stanislau; Ferreira, Placid M; Azeredo, Bruno P.
Affiliation
  • Sharstniou A; The Polytechnic School, Arizona State University, Mesa, AZ 85212.
  • Niauzorau S; The Polytechnic School, Arizona State University, Mesa, AZ 85212.
  • Ferreira PM; Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801.
  • Azeredo BP; The Polytechnic School, Arizona State University, Mesa, AZ 85212; bruno.azeredo@asu.edu.
Proc Natl Acad Sci U S A ; 116(21): 10264-10269, 2019 05 21.
Article in En | MEDLINE | ID: mdl-31068475
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Proc Natl Acad Sci U S A Year: 2019 Document type: Article Country of publication: United States
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Proc Natl Acad Sci U S A Year: 2019 Document type: Article Country of publication: United States