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Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner.
Lin, Chao; Zheng, Shan; Li, Pingyang; Shen, Zhonglei; Wang, Shuang.
Affiliation
  • Lin C; State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China. linchao@cqu.edu.cn.
  • Zheng S; State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.
  • Li P; State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.
  • Shen Z; State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.
  • Wang S; State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.
Micromachines (Basel) ; 10(8)2019 Aug 17.
Article in En | MEDLINE | ID: mdl-31426503
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2019 Document type: Article Affiliation country: China Country of publication: Switzerland
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2019 Document type: Article Affiliation country: China Country of publication: Switzerland