Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer.

Liu, Heng; Wu, Jiale; Zhang, Yu

Liu, Heng; Wu, Jiale; Zhang, Yu.

Affiliation

Liu H; School of Electronic & Information Engineering, Nanjing University of Information &Technology, Nanjing 210044, China.
Wu J; School of Electronic & Information Engineering, Nanjing University of Information &Technology, Nanjing 210044, China.
Zhang Y; School of Electronic & Information Engineering, Nanjing University of Information &Technology, Nanjing 210044, China.

Micromachines (Basel) ; 13(10)2022 Sep 27.

Article in En | MEDLINE | ID: mdl-36295965

Key words

averaging method; constant amplitude; frequency tracking; loop coupling; resonant accelerometer

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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: Micromachines (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Switzerland

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