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Study on the Deposition Uniformity of Triple-Target Magnetron Co-Sputtering System: Numerical Simulation and Experiment.
Zhu, Guo; Xiao, Baijun; Chen, Ganxin; Gan, Zhiyin.
Affiliation
  • Zhu G; School of Mechanical & Electrical Engineering, Hunan City University, Yiyang 413000, China.
  • Xiao B; School of Mechanical & Electrical Engineering, Hunan City University, Yiyang 413000, China.
  • Chen G; School of Mechanical & Electrical Engineering, Hunan City University, Yiyang 413000, China.
  • Gan Z; School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan 430074, China.
Materials (Basel) ; 15(21)2022 Nov 04.
Article in En | MEDLINE | ID: mdl-36363362
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Switzerland
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2022 Document type: Article Affiliation country: China Country of publication: Switzerland