Balance between the diffraction efficiency and process robustness for plasmonic lithographic alignment technology considering the Fabry-Perot resonator effect.
Appl Opt
; 62(15): 3839-3847, 2023 May 20.
Article
in En
| MEDLINE
| ID: mdl-37706692
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
2023
Document type:
Article
Country of publication:
United States