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High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE).
Liu, Jian; Liang, Youting; Gao, Lang; Sun, Chao; Guan, Jianglin; Wang, Zhe; Liu, Zhaoxiang; Fang, Zhiwei; Wang, Min; Zhang, Haisu; Cheng, Ya.
Affiliation
  • Liu J; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
  • Liang Y; The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
  • Gao L; State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-Intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China.
  • Sun C; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
  • Guan J; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
  • Wang Z; The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
  • Liu Z; The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
  • Fang Z; The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
  • Wang M; The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
  • Zhang H; The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
  • Cheng Y; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
Nanomaterials (Basel) ; 14(17)2024 Sep 09.
Article in En | MEDLINE | ID: mdl-39269128
ABSTRACT
We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanomaterials (Basel) Year: 2024 Document type: Article Affiliation country: China Country of publication: Switzerland
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanomaterials (Basel) Year: 2024 Document type: Article Affiliation country: China Country of publication: Switzerland