Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams.
IUCrJ
; 4(Pt 4): 431-438, 2017 Jul 01.
Article
en En
| MEDLINE
| ID: mdl-28875030
ABSTRACT
Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano-structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from 50â
µm down to 4â
µm are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a 15â
µm × 15â
µm target grating structure is separated from the scattering signal of 100â
µm × 100â
µm nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. As virtually all litho-graphically produced nanostructures have a predominant direction, the described technique allows GISAXS to be applied in a range of applications, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Tipo de estudio:
Incidence_studies
/
Risk_factors_studies
Idioma:
En
Revista:
IUCrJ
Año:
2017
Tipo del documento:
Article
País de afiliación:
Alemania