In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum.

Jurczyk, Jakub; Pillatsch, Lex; Berger, Luisa; Priebe, Agnieszka; Madajska, Katarzyna; Kapusta, Czeslaw; Szymanska, Iwona B; Michler, Johann; Utke, Ivo

Jurczyk, Jakub; Pillatsch, Lex; Berger, Luisa; Priebe, Agnieszka; Madajska, Katarzyna; Kapusta, Czeslaw; Szymanska, Iwona B; Michler, Johann; Utke, Ivo.

Afiliación

Jurczyk J; Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland.
Pillatsch L; Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow, Al. Mickiewicza 30, 30-059 Kraków, Poland.
Berger L; TOFWERK AG, Schorenstrasse 39, CH-3645 Thun, Switzerland.
Priebe A; Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland.
Madajska K; Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland.
Kapusta C; Faculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, Poland.
Szymanska IB; Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow, Al. Mickiewicza 30, 30-059 Kraków, Poland.
Michler J; Faculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, Poland.
Utke I; Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland.

Nanomaterials (Basel) ; 12(15)2022 Aug 06.

Article en En | MEDLINE | ID: mdl-35957140

Palabras clave

FEBID (Focused electron beam induced deposition); FEBiMS; TOFSIMS (Time-of-flight secondary ions mass spectrometry); electron induced fragmentation; ice lithography; ion extractor; lithography; mass spectrometry; metalorganic compounds

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Suiza Pais de publicación: Suiza

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