Released micromachined beams utilizing laterally uniform porosity porous silicon.

Sun, Xiao; Keating, Adrian; Parish, Giacinta

Sun, Xiao; Keating, Adrian; Parish, Giacinta.

Afiliação

Sun X; School of Mechanical and Chemical Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia ; School of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia.
Keating A; School of Mechanical and Chemical Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia.
Parish G; School of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, Western Australia 6009, Australia.

Nanoscale Res Lett ; 9(1): 426, 2014.

Article em En | MEDLINE | ID: mdl-25221457

Palavras-chave

Microbeams; Photolithography; Porous silicon; Release

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanoscale Res Lett Ano de publicação: 2014 Tipo de documento: Article País de afiliação: Austrália País de publicação: Estados Unidos

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