Low-angle optical vortex coronagraphic scatterometer.

The important, but difficult-to-measure zero and low-angle scattering spectrum, as well as the broader angular spectrum, was obtained by use of an optical vortex coronagraphic scatterometer (patent pending). The experimental measurements agreed well with the predictions from the Mie scattering theory. High contrast discrimination allowed us to remove the unscattered coherent illumination, revealing a low-angle superimposed scattered signal.