Improved accuracy of capacitive sensor-based micro-angle measurement with angular-to-linear displacement conversion.

Tan, Xinran; Zhu, Fan; Wang, Chao; Shi, Jian; Qi, Xue; Yu, Yang; Yuan, Feng; Tan, Jiubin

Tan, Xinran; Zhu, Fan; Wang, Chao; Shi, Jian; Qi, Xue; Yu, Yang; Yuan, Feng; Tan, Jiubin.

Afiliação

Tan X; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Zhu F; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Wang C; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Shi J; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Qi X; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Yu Y; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Yuan F; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Tan J; Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.

Rev Sci Instrum ; 88(11): 115104, 2017 Nov.

Article em En | MEDLINE | ID: mdl-29195359

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2017 Tipo de documento: Article País de afiliação: China País de publicação: Estados Unidos

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