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Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition.
Ma, Hong-Ping; Lu, Hong-Liang; Yang, Jia-He; Li, Xiao-Xi; Wang, Tao; Huang, Wei; Yuan, Guang-Jie; Komarov, Fadei F; Zhang, David Wei.
Afiliação
  • Ma HP; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. hpma@fudan.edu.cn.
  • Lu HL; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. honglianglu@fudan.edu.cn.
  • Yang JH; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. 18212020044@fudan.edu.cn.
  • Li XX; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. 18212020023@fudan.edu.cn.
  • Wang T; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. 15110720069@fudan.edu.cn.
  • Huang W; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. eehuangw@fudan.edu.cn.
  • Yuan GJ; SMIT Center, School of Automation and Mechanical Engineering, Shanghai University, Shanghai 201800, China. guangjie@shu.edu.cn.
  • Komarov FF; A.N. Sevchenko Institute of Applied Physical Problems, Belarusian State University, 220045 Minsk, Belarus. komarovf@bsu.by.
  • Zhang DW; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. dwzhang@fudan.edu.cn.
Nanomaterials (Basel) ; 8(12)2018 Dec 05.
Article em En | MEDLINE | ID: mdl-30563091
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Ano de publicação: 2018 Tipo de documento: Article País de afiliação: China País de publicação: Suíça
Texto completo
Adicionar na Minha BVS
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Ano de publicação: 2018 Tipo de documento: Article País de afiliação: China País de publicação: Suíça