2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

Meinel, Katja; Melzer, Marcel; Stoeckel, Chris; Shaporin, Alexey; Forke, Roman; Zimmermann, Sven; Hiller, Karla; Otto, Thomas; Kuhn, Harald

Meinel, Katja; Melzer, Marcel; Stoeckel, Chris; Shaporin, Alexey; Forke, Roman; Zimmermann, Sven; Hiller, Karla; Otto, Thomas; Kuhn, Harald.

Afiliação

Meinel K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Melzer M; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Stoeckel C; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Shaporin A; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Forke R; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Zimmermann S; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Hiller K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Otto T; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Kuhn H; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.

Sensors (Basel) ; 20(22)2020 Nov 18.

Article em En | MEDLINE | ID: mdl-33218078

Palavras-chave

2D; AlN; aluminum nitride; angle sensor; micromirror; microscanner; piezoelectric; two-dimensional scanning

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2020 Tipo de documento: Article País de afiliação: Alemanha País de publicação: Suíça

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