Periodic Arrays of Plasmonic Ag-Coated Multiscale 3D-Structures with SERS Activity: Fabrication, Modelling and Characterisation.

Surface enhanced Raman spectroscopy (SERS) is gaining importance as sensing tool. However, wide application of the SERS technique suffers mainly from limitations in terms of uniformity of the plasmonics structures and sensitivity for low concentrations of target analytes. In this work, we present SERS specimens based on periodic arrays of 3D-structures coated with silver, fabricated by silicon top-down micro and nanofabrication (10 mm × 10 mm footprint). Each 3D-structure is essentially an octahedron on top of a pyramid. The width of the top part-the octahedron-was varied from 0.7 µm to 5 µm. The smallest structures reached an analytical enhancement factor (AEF) of 3.9 × 107 with a relative standard deviation (RSD) below 20%. According to finite-difference time-domain (FDTD) simulations, the origin of this signal amplification lies in the strong localization of electromagnetic fields at the edges and surfaces of the octahedrons. Finally, the sensitivity of these SERS specimens was evaluated under close-to-reality conditions using a portable Raman spectrophotometer and monitoring of the three vibrational bands of 4-nitrobenzenethiol (4-NBT). Thus, this contribution deals with fabrication, characterization and simulation of multiscale 3D-structures with SERS activity.

Inkjet-Printed Functionalization of CMUT-Based CO2 Sensors.

The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO2 sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) films is optimized. It was shown that by the proper preparation of the active CMUT surface and properly diluted PEI solution, it is possible to minimize the functionalization shift of the resonance frequency and the quality of the resonance and preserve the sensitivity potential. So, after optimization, we demonstrated 23.2 kHz frequency shift readings of the sensor with 16 MHz nominal frequency while in the gas chamber and switching between pure N2 and CO2. After testing the sensors with different PEI film thickness, it was confirmed that a 200 nm average thickness of a PEI film is an optimum, because this is the practical limit of CO2 absorption depth at given conditions. Additionally, we note that modification of the hydrophilic/hydrophobic properties of the CMUT surface allows changing the nanoscale surface roughness of the printed PEI film and controlling the area resolution of the inkjet functionalization by reducing the diameter of a single dot down to 150 µm by a commercially available printer cartridge.

Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.

We present the design, simulation, fabrication and characterization of monolithically integrated high resistivity p-type boron-diffused silicon two-zone heaters in a model high temperature microreactor intended for nanoparticle fabrication. We used a finite element method for simulations of the heaters' operation and performance. Our experimental model reactor structure consisted of a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine microchannels network. We fabricated two separate spiral heaters with different temperatures, mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters were characterized by electric measurements and by infrared thermal vision. The obtained results show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or polysilicon heaters typically integrated into microreactors, our approach offers improved control over heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles in different materials as well, with various parameters and geometries. Our method can be generally applied to other high-temperature microsystems.

Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures.

In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin film of ZnO by RF magnetron sputtering. We, then, measure the SAW properties. This research investigates the properties of sputtered thin films for various amounts of O2/(Ar + O2) using Zn and ZnO targets. Regardless of target, the growth rate of the ZnO thin film decreases as the oxygen content increases. When the SAW is sputtered ZnO thin film using 30% oxygen, the digital signal of the SAW has better performance. The measurement signal of the SAW with micro-structures is similar to that without micro-structures.

Electrochemical nanoimprinting of silicon.

Scalable nanomanufacturing enables the commercialization of nanotechnology, particularly in applications such as nanophotonics, silicon photonics, photovoltaics, and biosensing. Nanoimprinting lithography (NIL) was the first scalable process to introduce 3D nanopatterning of polymeric films. Despite efforts to extend NIL's library of patternable media, imprinting of inorganic semiconductors has been plagued by concomitant generation of crystallography defects during imprinting. Here, we use an electrochemical nanoimprinting process-called Mac-Imprint-for directly patterning electronic-grade silicon with 3D microscale features. It is shown that stamps made of mesoporous metal catalysts allow for imprinting electronic-grade silicon without the concomitant generation of porous silicon damage while introducing mesoscale roughness. Unlike most NIL processes, Mac-Imprint does not rely on plastic deformation, and thus, it allows for replicating hard and brittle materials, such as silicon, from a reusable polymeric mold, which can be manufactured by almost any existing microfabrication technique.

Microfluidic device for label-free quantitation and distinction of bladder cancer cells from the blood cells using micro machined silicon based electrical approach; suitable in urinalysis assays.

This paper introduces an integrated microfluidic chip as a promising tool to measure the concentration of bladder cancer cells (BCC) in urine samples. Silicon microchannels were used as trapping gates for both floated BCC and leukocytes which are found in the urine of patients. By the assistance of the gold electrodes patterned at the bottom of the micro gates, the capacitance of captured cancerous and blood cells were measured. Different membrane capacitance between BCC and leukocyte was the indicative signal for diagnosing the nature of captured cells in a urine like solution. The concentration range of the target that could be detected was about 10 BCCs per one chip. Such response has been achieved without applying any biochemical or florescent markers. Thus, it could be a simple and cheap approach to support cytological and immune-fluorescent assays. The limit of detection was approximately 1 cancerous cell/11 leukocytes in 1ml of the urine like solution. The entire measurement time was less than an hour. Consequently, this electrical microfluidic device promises significant potential in urinalysis.

A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability.

A silicon-based micro-solid oxide fuel cell (µ-SOFC) with electrolyte membrane array embedded in a thin silicon supporting membrane, featuring a unique edge reinforcement structure, was demonstrated by utilizing simple silicon micromachining processes. The square silicon supporting membrane, fabricated by combining deep reactive ion etching and through-wafer wet etching processes, has thicker edges and corners than the center portion of the membrane, which effectively improved the mechanical stability of the entire fuel cell array during cell fabrication and cell operation. The 20 µm thick single crystalline silicon membrane supports a large number of 80 nm thick free-standing yttria-stabilized zirconia (YSZ) electrolytes. The fuel cell array was stably maintained at the open circuit voltage (OCV) of 1.04 V for more than 30 h of operation at 350 °C. A high peak power density of 317 mW/cm(2) was obtained at 400 °C. During a rigorous in situ thermal cycling between 150 and 400 °C at a fast cooling and heating rate of 25 °C/min, the OCV of the µ-SOFC recovered to its high value of 1.07 V without any drop caused by membrane failure, which justifies the superior thermal stability of this novel cell architecture.

Modeling of micromachined silicon-polymer 2-2 composite matching layers for 15MHz ultrasound transducers.

Silicon-polymer composites fabricated by micromachining technology offer attractive properties for use as matching layers in high frequency ultrasound transducers. Understanding of the acoustic behavior of such composites is essential for using them as one of the layers in a multilayered transducer structure. This paper presents analytical and finite element models of the acoustic properties of silicon-polymer composites in 2-2 connectivity. Analytical calculations based on partial wave solutions are applied to identify the resonance modes and estimate effective acoustic material properties. Finite Element Method (FEM) simulations were used to investigate the interaction between the composite and the surrounding load medium, either a fluid or a solid, with emphasis on the acoustic impedance of the composite. Composites with lateral periods of 20, 40 and 80µm were fabricated and used as acoustic matching layers for air-backed transducers operating at 15MHz. These composites were characterized acoustically, and the results were compared with analytical calculations. The analytical model shows that at low to medium silicon volume fraction, the first lateral resonance in the silicon-polymer 2-2 composite is defined by the composite period, and this lateral resonant frequency is at least 1.2 times higher than that of a piezo-composite with the same polymer filler. FEM simulations showed that the effective acoustic impedance of the silicon-polymer composite varies with frequency, and that it also depends on the load material, especially whether this is a fluid or a solid. The estimated longitudinal sound velocities of the 20 and 40µm period composites match the results from analytical calculations within 2.7% and 2.6%, respectively. The effective acoustic impedances of the 20 and 40µm period composites were found to be 10% and 26% lower than the values from the analytical calculations. This difference is explained by the shear stiffness in the solid, which tends to even out the surface displacements of the composites.

Microfabrication of stacks of acoustic matching layers for 15 MHz ultrasonic transducers.

This paper presents a novel method used to manufacture stacks of multiple matching layers for 15 MHz piezoelectric ultrasonic transducers, using fabrication technology derived from the MEMS industry. The acoustic matching layers were made on a silicon wafer substrate using micromachining techniques, i.e., lithography and etch, to design silicon and polymer layers with the desired acoustic properties. Two matching layer configurations were tested: a double layer structure consisting of a silicon-polymer composite and polymer and a triple layer structure consisting of silicon, composite, and polymer. The composite is a biphase material of silicon and polymer in 2-2 connectivity. The matching layers were manufactured by anisotropic wet etch of a (110)-oriented Silicon-on-Insulator wafer. The wafer was etched by KOH 40 wt%, to form 83 µm deep and 4.5mm long trenches that were subsequently filled with Spurr's epoxy, which has acoustic impedance 2.4 MRayl. This resulted in a stack of three layers: The silicon substrate, a silicon-polymer composite intermediate layer, and a polymer layer on the top. The stacks were bonded to PZT disks to form acoustic transducers and the acoustic performance of the fabricated transducers was tested in a pulse-echo setup, where center frequency, -6 dB relative bandwidth and insertion loss were measured. The transducer with two matching layers was measured to have a relative bandwidth of 70%, two-way insertion loss 18.4 dB and pulse length 196 ns. The transducers with three matching layers had fractional bandwidths from 90% to 93%, two-way insertion loss ranging from 18.3 to 25.4 dB, and pulse lengths 326 and 446 ns. The long pulse lengths of the transducers with three matching layers were attributed to ripple in the passband.

A micro-machined gyroscope for rotating aircraft.

In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.